Abstract: A lithographic apparatus including an illumination system configured to condition a radiation beam is described. The illumination system includes radiation beam uniformity adjuster for adjusting the uniformity of the radiation beam using segments that are at least partly arranged in the radiation beam and that are mounted on a frame by a torsion bar. The device further includes an actuator configured to rotate the segment in order to change the amount of radiation of the radiation beam that is blocked. The device also includes a first magnetic member mounted on the torsion bar configured to co-operate with a second magnetic member mounted on the frame for generating a position dependent torque about the longitudinal axis that is configured to at least partly compensate a torque exerted on the segment by the torsion bar.

Abstract: A lithographic projection apparatus includes a passive magnetic bearing configured to provide support between a first and second part of the lithographic apparatus and allow both parts to be displaced relative to each other in a direction perpendicular to the support direction. The passive magnetic bearing includes first and second magnetic assemblies. Each magnetic assembly includes at least one permanent magnet.

Abstract: A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part.

Abstract: A control system for a positioning device includes a controller connected in a feedback loop. The controller calculates a current for supply to the positioning device according to the error between a desired current value and a measured current value. This current is converted to a voltage by an amplifier and further modified by a feedforward voltage calculated using mechanical and electrical characteristics of the positioning device and a desired position and/or desired derivatives of position.

Abstract: A method and a system for accurate positioning of an object are presented. An embodiment of the invention includes an electromagnetic actuator including a coil assembly. The coil assembly includes two coils that encloses a magnet assembly including a magnet that is magnetized in the direction of the generated force. The generated force is substantially constant over the operating range of the actuator. The actuator may further be equipped with a cooling body surrounding the coil assembly.

Abstract: A magnetic actuator for adjusting a force on a load is presented herein. The magnetic actuator comprises a first actuating part that includes a first magnetic element and a second magnetic element, a second actuating part that includes a third magnetic element and a piezoelectric element attached to the first and second magnetic elements to relatively displace the first and second magnetic elements. The first actuating part and said second actuating part are constructed and arranged to generate a magnetic force between both actuating parts along a first direction with a load being attached to one of the first and second actuating parts.

Abstract: In a scanning exposure, the short stroke module accelerates the mask or substrate table with a higher acceleration that the long stroke module. The short stroke module starts at or near (proximate) one extreme of its range of motion and catches up to the long stroke module during the scan. The long stroke module starts to decelerate earlier but the short stroke decelerates faster so that the short stroke overtakes the long stroke and ends up at the other extreme of its range of motion. The acceleration times can be reduced without increasing the forces exerted by the long stroke actuators so there is less of an increase in dissipation and reaction forces.

Abstract: A control system for a positioning device includes a controller connected in a feedback loop. The controller calculates a current for supply to the positioning device according to the error between a desired current value and a measured current value. This current is converted to a voltage by an amplifier and further modified by a feedforward voltage calculated using mechanical and electrical characteristics of the positioning device and a desired position and/or desired derivatives of position.

Abstract: A magnetic actuator for adjusting a force on a load is presented herein. The magnetic actuator comprises a first actuating part that includes a first magnetic element and a second magnetic element, a second actuating part that includes a third magnetic element and a piezoelectric element attached to the first and second magnetic elements to relatively displace the first and second magnetic elements. The first actuating part and said second actuating part are constructed and arranged to generate a magnetic force between both actuating parts along a first direction with a load being attached to one of the first and second actuating parts.