Abstract: The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.

Abstract: A star tracker is used to measure the direction of stars. Preferably a wide imaging range is provided so that a reliable orientation of the star tracker can be computed from measurements of the directions of star at substantially different directions. The star tracker comprises a light baffle and located between the light baffle and an image sensing arrangement. The light baffle comprises an array of walls, including sidewalls and at least one internal wall between the sidewalls. Preferably, the side walls and the at least one internal wall are oriented at mutually different orientations emanating from a virtual line of intersection of the planes of the walls. Thus a range of star directions can be imaged with constant sensitivity.

Abstract: The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.

Abstract: Light sensor, comprising a non-translucent layer (1) having a translucent aperture (2), and a sensor array layer (3), comprising an array of op to-electrical sensor elements (3a-d), as well as a translucent solid first carrier layer (4) to which said non-translucent layer is applied at one side and said sensor array layer at the other side. A multitude of such light sensors can be manufactured by taking a first substrate (4) which is suitable as a translucent solid first carrier layer for said multitude of light sensors, applying the non-translucent layers (1) including an aperture (2) in each of them for said multitude of light sensors at one side of the first substrate and applying the sensor array layers (3) for said multitude of light sensors at the other side of the first substrate and, finally, separating the individual light sensors (7a-b). The light sensor may comprise an integrated opto-electric power supply (8, 9).

Abstract: A star tracker is used to measure the direction of stars. Preferably a wide imaging range is provided so that a reliable orientation of the star tracker can be computed from measurements of the directions of star at substantially different directions. The star tracker comprises a light baffle and located between the light baffle and an image sensing arrangement. The light baffle comprises an array of walls, including sidewalls and at least one internal wall between the sidewalls. Preferably, the side walls and the at least one internal wall are oriented at mutually different orientations emanating from a virtual line of intersection of the planes of the walls. Thus a range of star directions can be imaged with constant sensitivity.