Abstract: An electron beam transport system for controlling the position of two different electron beams comprises: a main electron beam transport module; a first input electron beam transport module; a second input electron beam transport module; and a controller. The main electron beam transport module comprises a beam monitoring device disposed at a measurement position. The first input electron beam transport module comprises a first actuator for applying a perturbation to a transverse position of a first electron beam at a first actuation point. The second input electron beam transport module comprises a second actuator for applying a perturbation to a transverse position of a second electron beam at a second actuation point. The controller is operable to receive a signal from the beam monitoring device and to send control signals to the first actuator and the second actuator.

Abstract: A lithographic method for measuring a position of a target grating with a mask sensor apparatus which comprises a plurality of detector modules each comprising a diffraction grating located at a mask side of a projection system of a lithographic apparatus and an associated detector, the method comprising a first step of measuring first intensities of a combination of diffraction orders diffracted from the target grating while the mask sensor apparatus is moved relatively to the target grating along a first direction; a second step of displacing the mask sensor apparatus relative to the target grating in a second direction, wherein a size of the relative displacement is proportional to a spatial frequency of a potential error; and a third step of measuring second intensities of the combination of diffraction orders diffracted from the target grating while the mask sensor apparatus is moved relatively to the target grating along the first direction.

Abstract: The present invention relates to coupler device, processing apparatus and method of processing a plurality of body-coupled communication signals which have been detected by using an electrode arrangement with a plurality of electrodes or electrode segments (40, 42; 40, 43). Respective transmission parameters of the body-coupled communication signals are estimated and at least one of a selecting and weighting processing is applied to the detected body-coupled communication signals based on the estimated transmission parameters. Then, the processed body-coupled communication signals are combined to generate a diversity output signal. Thereby, robustness against coupler misplacement and user convenience is increased in body-coupled or body-based communication systems.

Abstract: A lithographic apparatus is provided with a sensor. The sensor comprises a frame that defines a space that is crossed multiple times by wire. Detection electronics are connected to the wire and configured to detect a change of temperature of the wire due to infrared radiation being incident upon the wire. The detection electronics are further configured to provide an output signal in the event that a change of temperature of the wire is detected.

Abstract: A lithographic apparatus is provided with a sensor. The sensor comprises a frame that defines a space that is crossed multiple times by wire. Detection electronics are connected to the wire and configured to detect a change of temperature of the wire due to infrared radiation being incident upon the wire. The detection electronics are further configured to provide an output signal in the event that a change of temperature of the wire is detected.

Abstract: The present invention relates to coupler device, processing apparatus and method of processing a plurality of body-coupled communication signals which have been detected by using an electrode arrangement with a plurality of electrodes or electrode segments (40, 42; 40, 43). Respective transmission parameters of the body-coupled communication signals are estimated and at least one of a selecting and weighting processing is applied to the detected body-coupled communication signals based on the estimated transmission parameters. Then, the processed body-coupled communication signals are combined to generate a diversity output signal. Thereby, robustness against coupler misplacement and user convenience is increased in body-coupled or body-based communication systems.