Patents by Inventor Johannes Antonius Maria van den Oetelaar
Johannes Antonius Maria van den Oetelaar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9875879Abstract: A method of using a Charged Particle Microscope comprising: A specimen holder, connected to a positioning stage, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: Providing the microscope with an interferential optical position sensor for determining a position of said specimen holder relative to a reference; Providing an automatic controller with a time-dependent position signal from said optical position sensor; Invoking said controller to use said signal to produce a vibration profile for the microscope.Type: GrantFiled: August 22, 2016Date of Patent: January 23, 2018Assignee: FEI CompanyInventors: Jeroen De Boeij, Johannes Antonius Maria Van den Oetelaar, Albert Visscher
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Publication number: 20170125209Abstract: A method of using a Charged Particle Microscope comprising: A specimen holder, connected to a positioning stage, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: Providing the microscope with an interferential optical position sensor for determining a position of said specimen holder relative to a reference; Providing an automatic controller with a time-dependent position signal from said optical position sensor; Invoking said controller to use said signal to produce a vibration profile for the microscope.Type: ApplicationFiled: August 22, 2016Publication date: May 4, 2017Applicant: FEI CompanyInventors: Jeroen De Boeij, Johannes Antonius Maria Van den Oetelaar, Albert Visscher
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Patent number: 9147551Abstract: The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.Type: GrantFiled: June 7, 2014Date of Patent: September 29, 2015Assignee: FEI CompanyInventors: Uwe Luecken, Remco Schoenmakers, Johannes Antonius Maria van den Oetelaar
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Publication number: 20150069231Abstract: The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.Type: ApplicationFiled: June 7, 2014Publication date: March 12, 2015Applicant: FEI CompanyInventors: Uwe Luecken, Remco Schoenmakers, Johannes Antonius Maria van den Oetelaar
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Patent number: 8618478Abstract: A method and apparatus for reducing drift in a charged particle beam system. The method includes providing a charged particle beam column including a charged particle beam, a lens system, and a sample chamber; disposing a temperature-controlled device between the lens system and the sample chamber to control heat transfer between the lens system and the sample chamber; and controlling the temperature of the temperature-controlled device to reduce or eliminate the thermal drift of the position of a sample within the sample chamber relative to the position of the charged particle beam.Type: GrantFiled: December 21, 2012Date of Patent: December 31, 2013Assignee: FEI CompanyInventors: Casper Maria Smit, Johannes Antonius Maria van den Oetelaar
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Patent number: 7989778Abstract: A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.Type: GrantFiled: October 29, 2009Date of Patent: August 2, 2011Assignee: FEI CompanyInventors: Johannes Antonius Maria Van Den Oetelaar, Jorn Hermkens, Pleun Dona, Frank Nederlof, Wim Wondergem
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Patent number: 7888655Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders (10, 40) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders (10, 40) when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (50). At least one of the holders (40) may be equipped to hold a multitude of specimens.Type: GrantFiled: July 25, 2007Date of Patent: February 15, 2011Assignee: FEI CompanyInventors: Erik Pieter van Gaasbeek, Pleun Dona, Gerbert Jeroen van de Water, Johannes Antonius Maria van den Oetelaar, Paul Johannes Leonardes Barends, Ian Johannes Bernardus van Hees
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Publication number: 20080283768Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders (10, 40) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders (10, 40) when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (50). At least one of the holders (40) may be equipped to hold a multitude of specimens.Type: ApplicationFiled: July 25, 2007Publication date: November 20, 2008Applicant: FEI CompanyInventors: Erik Pieter van Gaasbeek, Pleun Dona, Gerbert Jeroen van de Water, Johannes Antonius Maria van den Oetelaar, Paul Johannes Leonardes Barends, Ian Johannes Bernardus van Hees