Patents by Inventor Johannes Arie Van Den Broek

Johannes Arie Van Den Broek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20090075012
    Abstract: A substrate carrier arranged to hold a substrate in position is disclosed. The substrate carrier has a transparent region that extends through the substrate carrier from a side of the substrate carrier on which the substrate is to be held to an opposite side of the substrate carrier, the transparent region being substantially transparent to a signal used to determine the position of an edge of the substrate on the substrate carrier.
    Type: Application
    Filed: September 13, 2007
    Publication date: March 19, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Paulus Wilhelmus Van Dijk, Henricus Wilhelmus Maria Van Buel, Gerardus Johannes Joseph Keijsers, Johannes Onvlee, Johannes Arie Van Den Broek
  • Lithographic apparatus and method
    Publication number: 20080055577
    Abstract: According to an aspect of the present invention, there is provided a method of projecting a pattern onto a substrate. The method includes rotating a mask having a plurality of patterns provided thereon, to select a pattern to be projected onto a substrate, using the selected pattern to impart a beam of radiation with a pattern in its cross-section corresponding to the selected pattern, and projecting the patterned beam of radiation onto a target portion of the substrate.
    Type: Application
    Filed: August 30, 2006
    Publication date: March 6, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Erik Marie Jose Smeets, David Christopher Ockwell, Johannes Arie Van Den Broek