Abstract: There is provided a support structure for temporarily supporting a substrate in a support di-reaction during one of treatment and handling of the substrate comprising a base structure and at least one layer connected to the base structure. The at least one layer defines at least one protrusion of the support structure, the at least one protrusion being adapted to contact the substrate when the substrate is supported by the support structure. The at least one layer comprises a wear resistant material.

Abstract: An assembly includes a part made of transparent material, in particular, quartz glass or calcium fluoride, and a metal part soldered. The following layer structure is present in the region of a solder joint: a transparent material of the transparent material part, an adhesion layer, a diffusion barrier layer, a first oxidation protection layer, a second oxidation protection layer, a solder layer, as required, a wetting auxiliary layer, and a metal of the metal part, respectively with transitions between the layers, in particular, in the typical manner for soldering, and possibly with diffusion of the two oxidation protection layers into the solder.

Abstract: The invention is directed to a method for welding a large optical component to a metal fixture. The transparent optical component is held in a vibration damping manner at its edge generally at opposite locations and next to an attachment location. The attachment is placed on the attachment location and the metal attachment is placed on the attachment location at the edge of the expanded optical component and the sonotrode is then placed on the attachment while applying only slight bending torques, if at all, and shearing forces. The ultrasonic welding is then carried out. In this way, the ultrasonic welding of optical components to metal attachments is made available even for large highly sensitive optical components. This is so especially when these components can be subjected only to slight loads because of their high sensitivity and/or high optical quality.