Patents by Inventor Johannes Freund

Johannes Freund has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10837120
    Abstract: One example describes a method of manufacturing Czochralski (CZ) silicon wafers. The method includes slicing an n-type CZ silicon ingot to form a plurality of CZ silicon wafers, determining a boron concentration of each CZ silicon wafer, dividing the CZ silicon wafers into sub-groups based on the boron concentration, wherein an average value of the boron concentration differs among the sub-groups, and labeling each sub-group of CZ silicon wafers with a different label which is indicative of the boron concentration.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: November 17, 2020
    Assignee: Infineon Technologies AG
    Inventors: Johannes Freund, Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze
  • Patent number: 10724149
    Abstract: In accordance with a method of manufacturing CZ silicon wafers, a parameter of at least two of the CZ silicon wafers is measured. A group of the CZ silicon wafers falling within a tolerance of a target specification is determined. The group of the CZ silicon wafers is divided into sub-groups taking into account the measured parameter. An average value of the parameter of the CZ silicon wafers of each sub-group differs among the sub-groups, and a tolerance of the parameter of the CZ silicon wafers of each sub-group is smaller than a tolerance of the parameter of the target specification. A labeling configured to distinguish between the CZ silicon wafers of different sub-groups is prepared. The CZ silicon wafers falling within the tolerance of the target specification are packaged.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: July 28, 2020
    Assignee: Infineon Technologies AG
    Inventors: Johannes Freund, Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze
  • Publication number: 20200224326
    Abstract: One example describes a method of manufacturing Czochralski (CZ) silicon wafers. The method includes slicing an n-type CZ silicon ingot to form a plurality of CZ silicon wafers, determining a boron concentration of each CZ silicon wafer, dividing the CZ silicon wafers into sub-groups based on the boron concentration, wherein an average value of the boron concentration differs among the sub-groups, and labeling each sub-group of CZ silicon wafers with a different label which is indicative of the boron concentration.
    Type: Application
    Filed: March 26, 2020
    Publication date: July 16, 2020
    Applicant: Infineon Technologies AG
    Inventors: Johannes Freund, Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze
  • Publication number: 20190249330
    Abstract: In accordance with a method of manufacturing CZ silicon wafers, a parameter of at least two of the CZ silicon wafers is measured. A group of the CZ silicon wafers falling within a tolerance of a target specification is determined. The group of the CZ silicon wafers is divided into sub-groups taking into account the measured parameter. An average value of the parameter of the CZ silicon wafers of each sub-group differs among the sub-groups, and a tolerance of the parameter of the CZ silicon wafers of each sub-group is smaller than a tolerance of the parameter of the target specification. A labeling configured to distinguish between the CZ silicon wafers of different sub-groups is prepared. The CZ silicon wafers falling within the tolerance of the target specification are packaged.
    Type: Application
    Filed: March 29, 2019
    Publication date: August 15, 2019
    Applicant: Infineon Technologies AG
    Inventors: Johannes Freund, Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze
  • Patent number: 10273597
    Abstract: In accordance with a method of manufacturing CZ silicon wafers, a parameter of at least two of the CZ silicon wafers is measured. A group of the CZ silicon wafers falling within a tolerance of a target specification is determined. The group of the CZ silicon wafers is divided into sub-groups taking into account the measured parameter. An average value of the parameter of the CZ silicon wafers of each sub-group differs among the sub-groups, and a tolerance of the parameter of the CZ silicon wafers of each sub-group is smaller than a tolerance of the parameter of the target specification. A labeling configured to distinguish between the CZ silicon wafers of different sub-groups is prepared. The CZ silicon wafers falling within the tolerance of the target specification are packaged.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: April 30, 2019
    Assignee: Infineon Technologies AG
    Inventors: Johannes Freund, Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze
  • Publication number: 20180002826
    Abstract: In accordance with a method of manufacturing CZ silicon wafers, a parameter of at least two of the CZ silicon wafers is measured. A group of the CZ silicon wafers falling within a tolerance of a target specification is determined. The group of the CZ silicon wafers is divided into sub-groups taking into account the measured parameter. An average value of the parameter of the CZ silicon wafers of each sub-group differs among the sub-groups, and a tolerance of the parameter of the CZ silicon wafers of each sub-group is smaller than a tolerance of the parameter of the target specification. A labeling configured to distinguish between the CZ silicon wafers of different sub-groups is prepared. The CZ silicon wafers falling within the tolerance of the target specification are packaged.
    Type: Application
    Filed: June 29, 2017
    Publication date: January 4, 2018
    Applicant: Infineon Technologies AG
    Inventors: Johannes Freund, Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze
  • Patent number: 9779931
    Abstract: An embodiment of a method of manufacturing semiconductor wafers comprises determining at least one material characteristic for at least two positions of a semiconductor ingot. A notch or a flat is formed in a semiconductor ingot extending along an axial direction. A plurality of markings is formed in the semiconductor ingot. At least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by a characteristic feature set depending on the at least one material characteristic. The semiconductor ingot is then sliced into semiconductor wafers.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: October 3, 2017
    Assignee: Infineon Technologies AG
    Inventors: Johannes Freund, Helmut Oefner, Hans-Joachim Schulze
  • Publication number: 20170103882
    Abstract: An embodiment of a method of manufacturing semiconductor wafers comprises determining at least one material characteristic for at least two positions of a semiconductor ingot. A notch or a flat is formed in a semiconductor ingot extending along an axial direction. A plurality of markings is formed in the semiconductor ingot. At least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by a characteristic feature set depending on the at least one material characteristic. The semiconductor ingot is then sliced into semiconductor wafers.
    Type: Application
    Filed: October 8, 2015
    Publication date: April 13, 2017
    Inventors: Johannes Freund, Helmut Oefner, Hans-Joachim Schulze
  • Patent number: 9536838
    Abstract: An embodiment of a method of manufacturing semiconductor wafers comprises forming a notch or a flat in a semiconductor ingot extending along an axial direction. A plurality of markings are formed in the semiconductor ingot. At least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by a characteristic feature. The semiconductor ingot is then sliced into semiconductor wafers.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: January 3, 2017
    Assignee: Infineon Technologies AG
    Inventors: Johannes Freund, Helmut Oefner, Hans-Joachim Schulze
  • Publication number: 20060073397
    Abstract: A masking arrangement and method for producing integrated circuit. arrangements are described. The masking arrangement includes a substrate with lithographic patterns. The lithographic patterns are arranged in different partial regions for integrated circuits that have mutually different wiring of components as well as for test patterns. Auxiliary patterns are provided for alignment of multiple lithography planes during production of one of the circuit arrangements either with or without simultaneous production of another of the circuit arrangement. The auxiliary patterns are arranged close to corners of each of the partial regions and contain alignment or overlap marks. The auxiliary patterns and the test pattern for a particular partial region form a frame around the partial region. Filling patterns are present between the partial regions.
    Type: Application
    Filed: October 6, 2005
    Publication date: April 6, 2006
    Inventors: Johannes Freund, Michael Stetter