Abstract: A construction is presented, which is comprised of two piezoelectric bending cantilevers, of different lengths, called a first bender and a second bender respectively, in which both benders bend in opposite directions. The second bender is mechanically in series connected to the first bender, thereby increasing the rotation angle of the tip of the second bender. The length of the second bender is chosen thus that in sinusoidal excitation, the tip of the second bender remains at the same point throughout the entire cycle, while it does undergo rotation. In this fashion a virtual axis at the tip of the second bender is created. The width of both benders is chosen such that the moment that the second bender can exert on an object that is connected to it, enables the construction to drive an optical element to scanning vibratory rotary motion with a large angle at high frequencies.

Abstract: A plurality of MEMS devices that can be easily configured to impart extended ranges of rotational and/or translational motion. The MEMS devices comprise a micro-electromechanical building block including a bendable member having a first end connectable to a support structure, and a straight rigid member having a first end connected to a second end of the bendable member. In the event the bendable member is in a straight condition, the rigid member extends from the second end of the bendable member toward the support structure. Further, the bendable member has a predetermined length, and the rigid member has a length at least within a range from one half to the full predetermined length of the bendable member to allow a free end of the rigid member to undergo extended rotational and/or translational motion in response to a displacement of the bendable member.

Abstract: A micromachined mirror scanning system having plural benders of morphs and support arms between a mirror surface of silicon and a surrounding frame. Electrical energization of the morphs with a DC voltage under the control of a computer provides a large range of mirror orientations and positions and the devices occupy a small planar package. The devices of the invention are formed from a single wafer of silicon and have low response times and large scan angles.

Abstract: A piezoelectric tactile sensor is disposed on the end of a flexible silicon beam to sense contact of the beam by an object, such as a circuit chiplead, whose position is to be measured. A piezoelectric actuator is disposed on top of the beam, and a variable DC voltage is supplied to the actuator to cause the beam to deflect into an object whose position is to be measured. Processing circuitry senses the signal generated by the sensor in response to contact with the object, and determines the position of the object from the magnitude of the actuator voltage at that point. To increase the magnitude of the signal generated by the sensor, an AC voltage is also supplied to the actuator to cause the beam to vibrate at a harmonic frequency. A plurality of the beams can be etched from a single wafer of silicon and utilized to simultaneously measure the positions of a plurality of circuit chipleads.

Abstract: Small piezoelectric machines comprised of pairs of cantilever beams covered with a piezoelectric material are driven to perform various mechanical tasks. A robot utilizes a plurality of pairs of these piezoelectrically driven beams to move itself and grab, carry or manipulate other objects.

Abstract: A piezoelectric tactile sensor is disposed on the end of a flexible silicon beam to sense contact of a beam by an object, such as a circuit chiplead, whose position is to be measured. A piezoelectric actuator is disposed on top of the beam, and a variablre DC voltage is supplied to the actuator to cause the beam to deflect into an object whose position is to be measured. Processing circuitry senses the signal generated by the sensor in response to contact with the object, and determines the position of the object from the magnitude of the actuator voltage at that point. To increase the magnitude of the signal generated by the sensor, an AC voltage is also supplied to the actuator to cause the beam to vibrate at a harmonic frequency. A plurality of the beams can be etched from a single wafer of silicon and utilized to simultaneously measure the positions of a plurality of circuit chipleads.

Abstract: A silicon micropump which can be manufactured by established integrated circuit techniques, and which is provided with piezoelectric valves, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves are made in silicon and glass, while the valves contain piezoelectric material, which allows opening and closing of the valves by electrical means.