Abstract: A zener diode having a semiconductor body (1) with a surface zone (1') doped with more than 10.sup.18 atoms/cc, in which at least two regions (2, 3) are provided through diffusion, which regions have substantially the same concentration of doping atoms and adjoin a surface (4) of the surface zone (1') and form p-n junctions (5,6) with the surface zone (1'), a first region (2) having a smaller lateral cross-section and a smaller depth than a second region (3). Both regions (2, 3) are connected to a first connection electrode (7, 8) provided on the surface (4), and a second connection electrode (9), which is spaced apart from the regions (2, 3), is provided on the semiconductor body (1). The first region has a side edge (10) which is formed through lateral diffusion and which is at least partly spaced apart from the second region (3). A higher electric field is created locally in the junction (5) during operation of the zener diode owing to the side edge (10).