Abstract: The invention relates to a holder for a semiconductor substrate including a main body which is provided with three or more projections by means of which the substrate can be held fixed in the holder. Two projections are fixedly connected, and a third projection present opposite the other two is movably connected to the main body. The third projection can be moved away from the other two and is urged towards the latter two by means. According to the invention, a lateral side of each projection facing towards the substrate to be inserted is provided with a convex recess whose geometry is such that exclusively the outermost edges of both the upper surface and the lower surface of the substrate to be inserted come into contact with the convex recess. A substrate, for example a round substrate, can be satisfactorily fastened in such a holder while still its entire surface area can be processed.

Abstract: The invention relates to a holder (10) for a semiconductor substrate (1) comprising a main body (2) which is provided with three or more projections (3) by means of which the substrate (1) can be held fixed in the holder (10). Two projections (3A, 3B) are fixedly connected, and a third projection (3C) present opposite the other two (3A, 3B) is movably connected to the main body (2). The third projection (3C) can be moved away from the other two (3A, 3B) and is urged towards the latter two by means (4).