Abstract: Generation of test data for verifying a modular correction of a modular multiplication performed by a multiplier unit for very wide operands includes performing, by a multiplier unit using a computer, a modular multiplication by correcting a binary multiplication of two operands by a coarse-grained and a fine-grained correction. The computer selects adjacent intervals of the intermediate result, defines a sub-interval closely around a boundary between the adjacent intervals, and selects a value in the sub-interval. Moreover, the computer uses a first factorization algorithm for the value V for determining operands A?, B?, where the modular multiplication result of the operands corrected by the coarse-grained correction is in the sub-interval. The computer repeatedly determines A? plus varying ?-values as A? values, and determines B? values, so that the modular multiplication corrected by the coarse-grained correction is in the sub-interval.

Abstract: The present disclosure relates to a method of operating a translation lookaside buffer (TLB) arrangement for a processor supporting virtual addressing, wherein multiple translation engines are used to perform translations on request of one of a plurality of dedicated processor units. The method comprises: maintaining by a cache unit a dependency matrix for the engines to track for each processing unit if an engine is assigned to the each processing unit for a table walk. The cache unit may block a processing unit from allocating an engine to a translation request when the engine is already assigned to the processing unit in the dependency matrix.

Abstract: The present disclosure relates to a method of operating a translation lookaside buffer (TLB) arrangement for a processor supporting virtual addressing, wherein multiple translation engines are used to perform translations on request of one of a plurality of dedicated processor units. The method comprises: maintaining by a cache unit a dependency matrix for the engines to track for each processing unit if an engine is assigned to the each processing unit for a table walk. The cache unit may block a processing unit from allocating an engine to a translation request when the engine is already assigned to the processing unit in the dependency matrix.

Abstract: The present disclosure relates to a method of operating a translation lookaside buffer (TLB) arrangement for a processor supporting virtual addressing, wherein multiple translation engines are used to perform translations on request of one of a plurality of dedicated processor units. The method comprises: maintaining by a cache unit a dependency matrix for the engines to track for each processing unit if an engine is assigned to the each processing unit for a table walk. The cache unit may block a processing unit from allocating an engine to a translation request when the engine is already assigned to the processing unit in the dependency matrix.

Abstract: The present disclosure relates to a method of operating a translation lookaside buffer (TLB) arrangement for a processor supporting virtual addressing, wherein multiple translation engines are used to perform translations on request of one of a plurality of dedicated processor units. The method comprises: maintaining by a cache unit a dependency matrix for the engines to track for each processing unit if an engine is assigned to the each processing unit for a table walk. The cache unit may block a processing unit from allocating an engine to a translation request when the engine is already assigned to the processing unit in the dependency matrix.

Abstract: The present disclosure relates to a method of operating a translation lookaside buffer (TLB) arrangement for a processor supporting virtual addressing, wherein multiple translation engines are used to perform translations on request of one of a plurality of dedicated processor units. The method comprises: maintaining by a cache unit a dependency matrix for the engines to track for each processing unit if an engine is assigned to the each processing unit for a table walk. The cache unit may block a processing unit from allocating an engine to a translation request when the engine is already assigned to the processing unit in the dependency matrix.

Abstract: The present disclosure relates to a method of operating a translation lookaside buffer (TLB) arrangement for a processor supporting virtual addressing, wherein multiple translation engines are used to perform translations on request of one of a plurality of dedicated processor units. The method comprises: maintaining by a cache unit a dependency matrix for the engines to track for each processing unit if an engine is assigned to the each processing unit for a table walk. The cache unit may block a processing unit from allocating an engine to a translation request when the engine is already assigned to the processing unit in the dependency matrix.

Abstract: Embodiments include a method comprising providing a primary transceiver, and a plurality of secondary transceivers spatially distributed throughout a transceiver field; and executing a setup-routine comprising a wave-routine including: the primary transceiver transmitting a cascading identification command to at least one initial secondary transceiver, wherein the identification command holds instructions for the secondary transceiver to short-range retransmit a same or modified copy of the identification command indiscriminately to neighboring secondary receivers, provided no such retransmission of the identification command was effected during a wave period immediately preceding reception of the identification command by the secondary transceiver, so as to effect a travelling wave of secondary transceivers retransmitting the identification command.

Abstract: Embodiments include a method comprising providing a primary transceiver, and a plurality of secondary transceivers spatially distributed throughout a transceiver field; and executing a setup-routine comprising a wave-routine including: the primary transceiver transmitting a cascading identification command to at least one initial secondary transceiver, wherein the identification command holds instructions for the secondary transceiver to short-range retransmit a same or modified copy of the identification command indiscriminately to neighboring secondary receivers, provided no such retransmission of the identification command was effected during a wave period immediately preceding reception of the identification command by the secondary transceiver, so as to effect a travelling wave of secondary transceivers retransmitting the identification command.

Abstract: The projection system of a lithographic apparatus has a plurality of pupil planes and at least two irises provided in respective pupil planes each optimized to provide a high degree of NA uniformity over a respective NA range so that a high degree of NA uniformity can be provided over a wide range of NA settings.

Abstract: In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure station the height of the physical reference surface is measured and related to the focal plane of the projection lens. The height map can then be used to determine the optimum height and/or tilt of substrate table to position the exposure area on the substrate in best focus during exposure. The same principles can be applied to (reflective) masks.

Abstract: In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure station the height of the physical reference surface is measured and related to the focal plane of the projection lens. The height map can then be used to determine the optimum height and/or tilt of substrate table to position the exposure area on the substrate in best focus during exposure. The same principles can be applied to (reflective) masks.

Abstract: A thick pellicle is allowed to have a non-flat shape and its shape is characterized to calculate corrections to be applied in exposures to compensate for the optical effects of the pellicle. The pellicle may be mounted so as to adopt a one-dimensional shape under the influence of gravity to make the compensation easier.

Abstract: A lithographic apparatus is provided that includes a purging device for purging a part of the apparatus with a purge gas. The purging device is operable in a first mode having a relatively high flow of purge gas and a second mode having a relatively low flow of purge gas. A controller that is constructed and arranged to control an intensity of the beam of radiation, so that the intensity of the beam of radiation can be made lower than a normal intensity in response to a change in mode of a purging device from the second mode to the first mode. The controller is arranged to monitor the downstream intensity of the beam of radiation as measured by a sensor and to prevent generation of radiation at the normal intensity until the downstream intensity of the beam of radiation meets a predetermined criterion.

Abstract: A lithographic projection apparatus is disclosed for use with an immersion liquid positioned between the projection system and a substrate. Several methods and mechanism are disclosed to protect components of the projection system, substrate table and a liquid confinement system. These include providing a protective coating on a final element of the projection system as well as providing one or more sacrificial bodies upstream of the components. A two component final optical element of CaF2 is also disclosed.

Abstract: In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure station the height of the physical reference surface is measured and related to the focal plane of the projection lens. The height map can then be used to determine the optimum height and/or tilt of substrate table to position the exposure area on the substrate in best focus during exposure. The same principles can be applied to (reflective) masks.