Patents by Inventor Johannes Leijtens

Johannes Leijtens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus
    Publication number: 20070139855
    Abstract: The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.
    Type: Application
    Filed: December 21, 2005
    Publication date: June 21, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Hubert Van Mierlo, Erik Ham, Hendricus Meijer, Hendrik Neerhof, Joost Ottens, Johannes Leijtens, Marco Kluse, Jan Hopman, Johannes Moors