Abstract: The invention relates to a measurement system for a projection system of a lithographic apparatus, comprising: —a sensor plate; —a detector comprising an array of detector areas; —a randomly ordered optical fiber bundle; —a positioner to position the sensor plate in the projection system; and —a control unit to control the positioning of the sensor plate and to obtain measurement data from an output of the detector, wherein a first free end of the optical fiber bundle is arranged to receive light from the sensor plate, wherein a second free end of the optical fiber bundle opposite the first free end of the optical fiber bundle is aligned with the array of detector areas of the detector, and wherein the control unit is configured to match each detector area with a corresponding location in a pupil plane of the projection system by collecting measurement data corresponding to different positions of the sensor plate relative to the projection system.

Abstract: The invention relates to a measurement system for a projection system of a lithographic apparatus, comprising: —a sensor plate; —a detector comprising an array of detector areas; —a randomly ordered optical fiber bundle; —a positioner to position the sensor plate in the projection system; and —a control unit to control the positioning of the sensor plate and to obtain measurement data from an output of the detector, wherein a first free end of the optical fiber bundle is arranged to receive light from the sensor plate, wherein a second free end of the optical fiber bundle opposite the first free end of the optical fiber bundle is aligned with the array of detector areas of the detector, and wherein the control unit is configured to match each detector area with a corresponding location in a pupil plane of the projection system by collecting measurement data corresponding to different positions of the sensor plate relative to the projection system.

Abstract: A substrate table with a sensor that includes a block of material provided with a layer of material opaque to radiation. The layer of material has at least one window configured to allow the transmission of the radiation. The sensor includes a wavelength conversion material located at the window, and a waveguide positioned to receive radiation emitted by the wavelength conversion material. The waveguide is embedded in the block of material and configured to guide radiation emitted by the wavelength conversion material through the block of material and towards a detector.