Patents by Inventor Johannes Marinus Maria ROVERS

Johannes Marinus Maria ROVERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
    Patent number: 11029612
    Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: June 8, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria Rovers, Eric Pierre-Yves Vennat, Maurice Willem Jozef Etienne Wijckmans
  • BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS, AND SPRING
    Publication number: 20200049203
    Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator.
    Type: Application
    Filed: February 15, 2018
    Publication date: February 13, 2020
    Inventors: Maarten Hartger KIMMAN, Hans BUTLER, Olof Martinus Josephus FISCHER, Christiaan Alexander HOOGENDAM, Theodorus Mattheus Joannus Maria HUIZINGA, Johannes Marinus Maria ROVERS, Eric Pierre-Yves VENNAT, Maurice Willem Jozef Etiënne WIJCKMANS
  • MAGNET ARRAY, ELECTRIC COIL DEVICE, DISPLACEMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20190074756
    Abstract: A magnet array for a displacement device for a displacement system, the magnet array comprising a two dimensional pattern of magnets of a first type and magnets of a second type, whereby magnets of the first type and magnets of the second type have parallel but opposing magnetizing direction and are alternatingly arranged at regular intervals in both a first and a second direction, wherein the first and second directions are not perpendicular to each other; a distance between two adjacent magnets of the same type in a third direction is unequal to a distance between two adjacent magnets of the same type in a fourth direction; and, the third and fourth direction are perpendicular to each other.
    Type: Application
    Filed: October 4, 2016
    Publication date: March 7, 2019
    Inventor: Johannes Marinus Maria ROVERS