Abstract: The invention relates to a beam analysis device (10) for determining the axial position of the focal point (71) of an energy beam or a sample beam (70) decoupled from an energy beam, comprising a beam-shaping device (12), a detector (40), and an analysis device (45). The beam-shaping device (12) is designed to release two sub-beams (72, 73) from the sample beam (70) on a plane of the sub-beam release process (19). The cross-sections of the two sub-beams (72, 73) are defined by sub-apertures (32, 33) which are delimited from each other and which are arranged at a distance k to each other in a first lateral direction (31). The beam-shaping device (12) is designed to image the two sub-beams (72, 73) in order to form two beam spots (92, 93) on the detector and deflect at least one of the two sub-beams (72, 73) in a second lateral direction (37) which is oriented transversely to the first lateral direction (31) in order to form a distance w in the second lateral direction (37) between the two beam spots (92, 93).

Abstract: The invention relates to a beam analysis device (10) for determining the axial position of the focal point (71) of an energy beam or a sample beam (70) decoupled from an energy beam, comprising a beam-shaping device (12), a detector (40), and an analysis device (45). The beam-shaping device (12) is designed to modulate an intensity distribution (81) of the energy beam (77) or the decoupled sample beam (70) on a modulation plane (19) using a two-dimensional transmission function in order to form a modulated sample beam (79). The transmission function has at least two contrast stages (32, 33) with a distance a to each other in the form of transitions between at least one blocking region (25) and at least one passage region (21). The beam-shaping device (12) is designed to guide the modulated sample beam (79) onto the detector (40) along a propagation path in order to form the intensity distribution (83) on the detector (40) with at least two contrast features (92, 93) along the first lateral direction (31).

Abstract: The present disclosure relates to a beam analysis device for determining a light beam state, e.g., determining the focal position of a light beam, where the device has a partial beam imaging device having at least one first selection device for forming a first partial beam from a first partial aperture region of the first measurement beam, and an imaging device for imaging the first partial beam for generating a first beam spot onto a detector unit having a spatially-resolving detector. The beam analysis device also can have an evaluation unit for processing the signals of the detector unit, for determining a lateral position (a1) of the first beam spot, and for determining changes in the lateral position (a1, a1?) of the first beam spot over time. An optical system for focal position control with a laser optics and with a beam analysis device.