Patents by Inventor Johannes Roland Dassel

Johannes Roland Dassel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and position sensor
    Patent number: 7830495
    Abstract: A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter.
    Type: Grant
    Filed: July 10, 2007
    Date of Patent: November 9, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Olaf Hubertus Wilhelmus Van Bruggen, Marcel Koenraad Marie Baggen, Johannes Roland Dassel, Remko Wakker, Stoyan Nihtianov, Frank Auer, Frits Van Der Meulen, Patrick David Vogelsang, Martinus Cornelis Reijnen, Tom Van Zutphen
  • Lithographic apparatus and position sensor
    Publication number: 20090015246
    Abstract: A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter.
    Type: Application
    Filed: July 10, 2007
    Publication date: January 15, 2009
    Applicant: ASML Netherlands B.V.
    Inventors: Olaf Hubertus Wilhelmus Van Bruggen, Frank Auer, Marcel Koenraad Marie Baggen, Frits Van Der Meulen, Patrick David Vogelsang, Martinus Cornelis Reijnen, Johannes Roland Dassel, Stoyan Nihtianov, Remko Wakker, Tom Van Zutphen
  • Method and device for processing signals in a protection system
    Patent number: 5822514
    Abstract: A method and system for processing signals in a protection system involves executing operations on signals that are complimentary to each other, such that the results of the operations determines whether the operations can be continued. Logic operations are performed and controlled variables, and complimentary operations are performed and controlled by state machines which trigger one another, to configure the system as a "house of cards" architecture, such that the entire correct functioning of the system of cooperating state machines is disabled when something goes wrong with one of the state machines.
    Type: Grant
    Filed: July 17, 1996
    Date of Patent: October 13, 1998
    Assignee: NV GTI Holding
    Inventors: Hendrik Christian Steinz, Johannes Roland Dassel