Patents by Inventor Johannes Voelkl

Johannes Voelkl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for producing at least one SiC single crystal
    Patent number: 6344085
    Abstract: A device for producing a silicon carbide (SiC) single crystal contains a crucible having a storage region for holding a stock of solid SiC and having a crystal region for holding a SiC seed crystal. An insert made from glassy carbon is disposed in the crucible. In the method, solid SiC is sublimed as a result of the stock being heated and SiC in the gas phase is generated, which is conveyed to the SiC seed crystal, on which it grows as an SiC single crystal. A heat flux is controlled by an insert made from glassy carbon.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: February 5, 2002
    Assignee: Siemens Aktiengesellschaft
    Inventors: Harald Kuhn, Roland Rupp, Rene Stein, Johannes Völkl
  • Method and apparatus for the production of SiC by means of CVD with improved gas utilization
    Patent number: 6299683
    Abstract: A process gas stream (2) is generated, from which SiC is deposited on a substrate (4) by means of CVD. Furthermore, a second gas stream (3) of an inert gas is generated, which substantially surrounds the process gas stream (2) in its direction of flow. This results in a higher yield of the process gases.
    Type: Grant
    Filed: January 30, 1997
    Date of Patent: October 9, 2001
    Assignee: Siemens Aktiengesellschaft
    Inventors: Roland Rupp, Johannes Voelkl
  • Device for treating a substrate
    Patent number: 6153012
    Abstract: A device for treating at least one substrate comprises a susceptor that is thermally coupled to the substrate and an induction-heating device for heating the susceptor. The induction-heating device and the susceptor are so disposed with respect to one another that an electromagnetic force acting on the susceptor is directed parallel to the force of gravity. As a result, a mechanically and thermally stable structure is assured.
    Type: Grant
    Filed: June 4, 1997
    Date of Patent: November 28, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventors: Roland Rupp, Johannes Voelkl