Patents by Inventor Johannes W. J. L. CUIJPERS

Johannes W. J. L. CUIJPERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement and method for cooling a plasma-based radiation source
    Patent number: 9202659
    Abstract: An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: December 1, 2015
    Assignee: USHIO Denki Kabushiki Kaisha
    Inventors: Gota Niimi, Dominik Marcel Vaudrevange, Ralf Gordon Conrads, Maghiel Jan Kole, Wilhelmus V. J. Van Nunspeet, Johannes W. J. L. Cuijpers, Andre Matthias Prinz
  • ARRANGEMENT AND METHOD FOR COOLING A PLASMA-BASED RADIATION SOURCE
    Publication number: 20150108365
    Abstract: An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 23, 2015
    Inventors: Gota NIIMI, Dominik Marcel VAUDREVANGE, Ralf Gordon CONRADS, Maghiel Jan KOLE, Wilhelmus V. J. VAN NUNSPEET, Johannes W. J. L. CUIJPERS, Andre Matthias PRINZ