Patents by Inventor Johannes Wihelmus Damen

Johannes Wihelmus Damen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic Clamp, Lithographic Apparatus, and Device Manufacturing Method
    Publication number: 20140218711
    Abstract: An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.
    Type: Application
    Filed: February 7, 2012
    Publication date: August 7, 2014
    Applicant: ASML Netherlands B.V.
    Inventors: Eugene Maria Brinkhof, Jan Bex, Anko Jozef Cornelus Sijben, Johannes Wihelmus Damen