Patents by Inventor Johannes Wilhelmus Jacobus Leonardus Culjpers

Johannes Wilhelmus Jacobus Leonardus Culjpers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS CLEANING METHOD
    Publication number: 20110222034
    Abstract: An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.
    Type: Application
    Filed: May 18, 2011
    Publication date: September 15, 2011
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Marco Koert STAVENGA, Hans Jansen, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Culjpers, Raymond Gerardus Marius Beeren