Patents by Inventor Johannes Wilhelmus Maria Krikhaar

Johannes Wilhelmus Maria Krikhaar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate holder and device manufacturing method
    Patent number: 7494828
    Abstract: A second substrate, e.g. a III/V compound semiconductor, is placed on a first substrate, e.g. a wafer, in the vicinity of placement marks on the first substrate. The second substrate is exposed to patterned radiation, e.g. for the manufacture of integrated circuits.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: February 24, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Keith Frank Best, Johannes Wilhelmus Maria Krikhaar, Rudy Jan Maria Pellens
  • Device, lithographic apparatus and device manufacturing method
    Publication number: 20070238261
    Abstract: A device for locally treating a substrate is disclosed. The device includes an enclosure for forming an enclosed environment at a location on the substrate, a seal for sealing the enclosed environment between the enclosure and the substrate, a supply channel for supplying a chemical reactant to the location, and a removal channel for removing a chemical from the enclosed environment.
    Type: Application
    Filed: April 5, 2006
    Publication date: October 11, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Rudy Jan Maria Pellens, Arnout Johannes Meester, Hendrikus Wilhelmus Van Zeijl
  • Substrate holder and device manufacturing method
    Patent number: 6822730
    Abstract: A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
    Type: Grant
    Filed: July 9, 2003
    Date of Patent: November 23, 2004
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen, Joeri Lof
  • Substrate holder and device manufacturing method
    Publication number: 20040052031
    Abstract: A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
    Type: Application
    Filed: July 9, 2003
    Publication date: March 18, 2004
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen, Joeri Lof