Patents by Inventor Johannes Wilhelmus MOLLEN

Johannes Wilhelmus MOLLEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and method
    Patent number: 10775707
    Abstract: A method of performing a lithographic exposure of a substrate, the substrate being held on a substrate table, the substrate table comprising a cooling system operative to cool the substrate table, the method comprising performing an alignment measurement of the substrate, applying heat to the substrate table to reduce cooling of the substrate table provided by the cooling system, the heat being applied between a time at which the alignment measurement is performed and a time at which the lithographic exposure is performed and performing the lithographic exposure of the substrate.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: September 15, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Güneş Nakìbo{hacek over (g)}lu, Manon Elise Will, Sander Catharina Reinier Derks, Johannes Wilhelmus Mollen
  • Lithographic Apparatus and Method
    Publication number: 20200041916
    Abstract: A method of performing a lithographic exposure of a substrate, the substrate being held on a substrate table, the substrate table comprising a cooling system operative to cool the substrate table, the method comprising performing an alignment measurement of the substrate, applying heat to the substrate table to reduce cooling of the substrate table the substrate table provided by the cooling system, the heat being applied between a time at which the alignment measurement is performed and a time at which the lithographic exposure is performed and performing the lithographic exposure of the substrate.
    Type: Application
    Filed: September 21, 2017
    Publication date: February 6, 2020
    Applicant: ASML Netherlands B.V.
    Inventors: Günes NAKÌBOGLU, Manon Elise WILL, Sander Catharina Reinier DERKS, Johannes Wilhelmus MOLLEN