Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A movable beam (182a) and a movable beam (182b) each having one end fixed to a frame portion (181) of a mirror substrate (108) are provided inside the frame portion (181). The movable beam (182a) and the movable beam (182b) each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion (181) are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam (182a) and the movable beam (182b) has the other end displaceable in the normal line direction of the mirror substrate (108) and therefore has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) and connected to them via a pair of connectors (109a, 109b).

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: When a light intensity upon a perturbation is detected, an error calculation/correction unit (85) in a control unit (8) corrects and updates the above-described initial manipulated variables based on perturbation manipulated variables and manipulated variables, i.e., operation manipulated variables to obtain the maximum light intensity from the light intensity value at each perturbation manipulated variable, thereby adjusting the tilt angle of a mirror. More specifically, assuming that the time series data of an acquired output light intensity can be approximated to a cosine function, the error calculation/correction unit (85) calculates a phase difference ? between the cosine function and a sine or cosine function used to set x- and y-axis perturbation patterns for a circular trajectory perturbation. Manipulated variables at coordinates defined by the phase difference ? and polar coordinates of a radius voltage to perturb the mirror are calculated.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A detection means (52) detects optimum driving voltages of a mirror device. A correction means (53) corrects driving voltage values in a table (54b) based on the optimum driving voltages. This makes it possible to drive the mirror to an optimum pivot angle even when the optimum pivot angle of the mirror changes due to, e.g., mirror drift or a change in the environment such as temperature.

Abstract: A mirror control device includes a pivotally supported mirror (230), electrodes (340a-340d) spaced apart from the mirror (230), a driving voltage generation means (401) for generating a driving voltage corresponding to the desired tilt angle of the mirror (230) for each electrode, a bias voltage generation means (402) for generating, as a bias voltage for each electrode, a voltage which causes the tilt angle of the mirror (230) to have the same predetermined value upon being independently applied to each of the electrodes (340a-340d), and an electrode voltage applying means (403) for adding, for each electrode, the bias voltage to the driving voltage and applying the voltage after addition to a corresponding one of the electrodes (340a-340d).

Abstract: When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.

Abstract: A movable beam (182a) and a movable beam (182b) each having one end fixed to a frame portion (181) of a mirror substrate (108) are provided inside the frame portion (181). The movable beam (182a) and the movable beam (182b) each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion (181) are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam (182a) and the movable beam (182b) has the other end displaceable in the normal line direction of the mirror substrate (108) and therefore has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) and connected to them via a pair of connectors (109a, 109b).

Abstract: A detection means (52) detects optimum driving voltages of a mirror device. A correction means (53) corrects driving voltage values in a table (54b) based on the optimum driving voltages. This makes it possible to drive the mirror to an optimum pivot angle even when the optimum pivot angle of the mirror changes due to, e.g., mirror drift or a change in the environment such as temperature.

Abstract: When a light intensity upon a perturbation is detected, an error calculation/correction unit (85) in a control unit (8) corrects and updates the above-described initial manipulated variables based on perturbation manipulated variables and manipulated variables, i.e., operation manipulated variables to obtain the maximum light intensity from the light intensity value at each perturbation manipulated variable, thereby adjusting the tilt angle of a mirror. More specifically, assuming that the time series data of an acquired output light intensity can be approximated to a cosine function, the error calculation/correction unit (85) calculates a phase difference ? between the cosine function and a sine or cosine function used to set x- and y-axis perturbation patterns for a circular trajectory perturbation. Manipulated variables at coordinates defined by the phase difference ? and polar coordinates of a radius voltage to perturb the mirror are calculated.

Abstract: When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.

Abstract: A mirror control device includes a pivotally supported mirror (230), electrodes (340a-340d) spaced apart from the mirror (230), a driving voltage generation means (401) for generating a driving voltage corresponding to the desired tilt angle of the mirror (230) for each electrode, a bias voltage generation means (402) for generating, as a bias voltage for each electrode, a voltage which causes the tilt angle of the mirror (230) to have the same predetermined value upon being independently applied to each of the electrodes (340a-340d), and an electrode voltage applying means (403) for adding, for each electrode, the bias voltage to the driving voltage and applying the voltage after addition to a corresponding one of the electrodes (340a-340d).

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: An optical fiber array includes an alignment substrate, a plurality of ferrules, and a plurality of optical fibers. The alignment substrate has a plurality of guide holes which are two-dimensionally arrayed and extend through the substrate. The ferrules are respectively inserted into the guide holes in the same direction and have through holes in the central portions. The optical fibers are fitted and held in the respective through holes. The guide hole is formed into a cylindrical shape having a diameter substantially equal to the outer diameter of the ferrule. The light incident/exit end face of the optical fiber is exposed on one end face of the ferrule.

Abstract: An optical fiber array includes an alignment substrate, a plurality of ferrules, and a plurality of optical fibers. The alignment substrate has a plurality of guide holes which are two-dimensionally arrayed and extend through the substrate. The ferrules are respectively inserted into the guide holes in the same direction and have through holes in the central portions. The optical fibers are fitted and held in the respective through holes. The guide hole is formed into a cylindrical shape having a diameter substantially equal to the outer diameter of the ferrule. The light incident/exit end face of the optical fiber is exposed on one end face of the ferrule.