Abstract: Apparatus for measuring the normal force (F.sub.n) exerted on a pin by a receptacle contact. The normal force measuring transducer (20) has a support beam (34) and a sensing beam (50). Sensing beam (50) has a monocrystalline silicon element (30) and may include beam element (40). Piezoresistive elements (E.sub.1, E.sub.2, E.sub.3 and E.sub.4) are atomically bonded to element (30) using techniques of solid state diffusion. Fine lines (76) of conductive material interconnect the piezoresistive elements to connection pads (GP.sub.1, GP.sub.2, GP.sub.3 and GP.sub.4). The support beam (34) and sensing beam (50) have a deflecting space (70) therebetween and two supports (56,58) therealong. Normal force applied to the beams causes a change in the resistance of the piezoresistive elements indicative of the magnitude of the normal force.

Abstract: Apparatus for measuring the normal force exerted on a pin by a receptacle contact comprises a pair of beams profiled as the pin and having inward facing deflecting surfaces defining a central space. A thin film integrated circuit bonded to one of the beams includes a pair of strain gages at each end of the deflecting surface and leads extending to solder pads remote from the probe.