Patents by Inventor John A. Fitzsimmons

John A. Fitzsimmons has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10923427
    Abstract: An SOI semiconductor device includes a first wafer having an active semiconductor layer and a first oxide layer and a second wafer having a semiconductor substrate and a second oxide layer, the first oxide layer being bonded to the second oxide layer, and one of the first wafer and the second wafer includes a nitride layer. The nitride layer can be formed between the semiconductor substrate and the second oxide layer. A third oxide layer can be formed on the semiconductor substrate and the nitride layer is formed between the second oxide layer and the third oxide layer. The nitride layer can be formed between the active semiconductor layer and the first oxide layer. The first wafer can include a third oxide layer formed on the active semiconductor layer and the nitride layer is formed between the third oxide layer and the first oxide layer.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: February 16, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons
  • Publication number: 20190172789
    Abstract: An SOI semiconductor device includes a first wafer having an active semiconductor layer and a first oxide layer and a second wafer having a semiconductor substrate and a second oxide layer, the first oxide layer being bonded to the second oxide layer, and one of the first wafer and the second wafer includes a nitride layer. The nitride layer can be formed between the semiconductor substrate and the second oxide layer. A third oxide layer can be formed on the semiconductor substrate and the nitride layer is formed between the second oxide layer and the third oxide layer. The nitride layer can be formed between the active semiconductor layer and the first oxide layer. The first wafer can include a third oxide layer formed on the active semiconductor layer and the nitride layer is formed between the third oxide layer and the first oxide layer.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 6, 2019
    Inventors: Anthony K Stamper, Mukta G. Farooq, John A Fitzsimmons
  • Patent number: 10242947
    Abstract: An SOI semiconductor device includes a first wafer having an active semiconductor layer and a first oxide layer and a second wafer having a semiconductor substrate and a second oxide layer, the first oxide layer being bonded to the second oxide layer, and one of the first wafer and the second wafer includes a nitride layer. The nitride layer can be formed between the semiconductor substrate and the second oxide layer. A third oxide layer can be formed on the semiconductor substrate and the nitride layer is formed between the second oxide layer and the third oxide layer. The nitride layer can be formed between the active semiconductor layer and the first oxide layer. The first wafer can include a third oxide layer formed on the active semiconductor layer and the nitride layer is formed between the third oxide layer and the first oxide layer.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: March 26, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons
  • Patent number: 10078096
    Abstract: Aspects of this invention include new measures of hip-torso posture and strength of the legs. These new measures are made using new tools. Measurement of hip-torso posture can be made using simple tools. One such tool can be applied to the hips, and indicates relative angle of the spine. Photographic tools can be used to analyze posture relative to vertical references. Measurement of leg strength can be made using a device incorporating accelerometers and computer implemented instructions to quantify forward/backward, left/right, or rotational acceleration when the legs are challenged. Other aspects include devices with computer implemented instructions to quantify leg strength. Using the new devices and methods, one can objectively determine postures that are ergonomically appropriate for persons sitting and working at workstations.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: September 18, 2018
    Inventors: John Fitzsimmons, Alexander Kouznetsov
  • Patent number: 10074562
    Abstract: Embodiments of present invention provide a method of forming a semiconductor structure. The method includes forming a semiconductor structure having a first metal layer and a plurality of dielectric layers on top of the first metal layer; creating one or more openings through the plurality of dielectric layers to expose the first metal layer underneath the plurality of dielectric layers; causing the one or more openings to expand downward into the first metal layer and expand horizontally into areas underneath the plurality of dielectric layers; applying a layer of lining material in lining sidewalls of the one or more openings inside the plurality of dielectric layers; and filling the expanded one or more openings with a conductive material.
    Type: Grant
    Filed: July 26, 2016
    Date of Patent: September 11, 2018
    Assignee: International Business Machines Corporation
    Inventors: Rosa A. Orozco-Teran, Ravikumar Ramachandran, John A. Fitzsimmons, Russell H. Arndt, David L. Rath
  • Patent number: 10037911
    Abstract: Assemblies including a device layer of a silicon-on-insulator (SOI) substrate and a replacement substrate replacing a handle wafer of the SOI substrate, and methods for transferring the device layer of the SOI substrate from the handle wafer to the replacement substrate. A device structure is formed in a first section of the handle wafer, and a second section of the handle wafer adjoining the first section of the handle wafer is removed to expose a surface of the buried dielectric layer of the silicon-on-insulator substrate. A permanent substrate is attached to the surface of the buried dielectric layer. When the permanent substrate is attached to the surface of the buried dielectric layer, the section of the handle wafer is received inside a cavity defined in the permanent substrate.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: July 31, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons, Mark D. Jaffe, Randy L. Wolf
  • Patent number: 9966310
    Abstract: One aspect of the disclosure relates to a method of forming an integrated circuit structure. The method may include providing a substrate having a front side and a back side, the substrate including a deep trench (DT) capacitor within the substrate extending toward the back side of the substrate; etching the substrate on the back side of the substrate to remove at least a portion of the substrate on the back side; forming a first dielectric layer covering the back side of the substrate and extending away from the front side of the substrate; and forming a through silicon via (TSV) adjacent to the DT capacitor, the TSV extending through the first dielectric layer toward the front side of the substrate.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: May 8, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Mukta G. Farooq, John A. Fitzsimmons, Anthony K. Stamper
  • Publication number: 20180108566
    Abstract: One aspect of the disclosure relates to a method of forming an integrated circuit structure. The method may include providing a substrate having a front side and a back side, the substrate including a deep trench (DT) capacitor within the substrate extending toward the back side of the substrate; etching the substrate on the back side of the substrate to remove at least a portion of the substrate on the back side; forming a first dielectric layer covering the back side of the substrate and extending away from the front side of the substrate; and forming a through silicon via (TSV) adjacent to the DT capacitor, the TSV extending through the first dielectric layer toward the front side of the substrate.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 19, 2018
    Inventors: Mukta G. Farooq, John A. Fitzsimmons, Anthony K. Stamper
  • Patent number: 9929085
    Abstract: One aspect of the disclosure relates to an interposer. The interposer may include: a first dielectric layer extending from a substrate in a direction away from a front side of the substrate; a back-end-of-the-line (BEOL) region extending from the substrate in a direction away from the back side of the substrate; a deep trench (DT) capacitor within the substrate and extending toward a back side of the substrate, the DT capacitor having a first portion within the substrate and a second portion within the first dielectric layer; and a through silicon via (TSV) adjacent to the DT capacitor and extending through the first dielectric layer, the substrate, and the BEOL region.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: March 27, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: John A. Fitzsimmons, Mukta G. Farooq, Anthony K. Stamper
  • Patent number: 9892970
    Abstract: One aspect of the disclosure relates to a method of forming an integrated circuit structure. The method may include: providing a substrate having a front side and a back side, the substrate including: a deep trench (DT) capacitor within the substrate extending toward the back side of substrate, and a through silicon via (TSV) adjacent to the DT capacitor within the substrate extending toward the back side of the substrate, the TSV including a metal substantially surrounded by a liner layer and an insulating layer substantially surrounding the liner layer; etching the back side of the substrate to expose the TSV on the back side of the substrate; and forming a first dielectric layer covering the exposed TSV on the back side of the substrate and extending away from the front side of the substrate.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: February 13, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Mukta G. Farooq, John A. Fitzsimmons, Anthony K. Stamper
  • Publication number: 20180012845
    Abstract: An SOI semiconductor device includes a first wafer having an active semiconductor layer and a first oxide layer and a second wafer having a semiconductor substrate and a second oxide layer, the first oxide layer being bonded to the second oxide layer, and one of the first wafer and the second wafer includes a nitride layer. The nitride layer can be formed between the semiconductor substrate and the second oxide layer. A third oxide layer can be formed on the semiconductor substrate and the nitride layer is formed between the second oxide layer and the third oxide layer. The nitride layer can be formed between the active semiconductor layer and the first oxide layer. The first wafer can include a third oxide layer formed on the active semiconductor layer and the nitride layer is formed between the third oxide layer and the first oxide layer.
    Type: Application
    Filed: September 25, 2017
    Publication date: January 11, 2018
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons
  • Publication number: 20180005873
    Abstract: Assemblies including a device layer of a silicon-on-insulator (SOI) substrate and a replacement substrate replacing a handle wafer of the SOI substrate, and methods for transferring the device layer of the SOI substrate from the handle wafer to the replacement substrate. A device structure is formed in a first section of the handle wafer, and a second section of the handle wafer adjoining the first section of the handle wafer is removed to expose a surface of the buried dielectric layer of the silicon-on-insulator substrate. A permanent substrate is attached to the surface of the buried dielectric layer. When the permanent substrate is attached to the surface of the buried dielectric layer, the section of the handle wafer is received inside a cavity defined in the permanent substrate.
    Type: Application
    Filed: August 31, 2017
    Publication date: January 4, 2018
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons, Mark D. Jaffe, Randy L. Wolf
  • Patent number: 9852959
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to corrosion resistant chip sidewall connections with crackstop structures with a hermetic seal, and methods of manufacture. The structure includes: a guard ring structure surrounding an active region of an integrated circuit chip; an opening formed in the guard ring structure; and a hermetic seal encapsulating the opening and a portion of the guard ring structure, the hermetic seal being structured to prevent moisture ingress to the active region of the integrated circuit chip through the opening.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: December 26, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: John A. Fitzsimmons, Michael J. Shapiro, Natalia Borjemscaia, Vincent McGahay
  • Publication number: 20170352592
    Abstract: One aspect of the disclosure relates to a method of forming an integrated circuit structure. The method may include: providing a substrate having a front side and a back side, the substrate including: a deep trench (DT) capacitor within the substrate extending toward the back side of substrate, and a through silicon via (TSV) adjacent to the DT capacitor within the substrate extending toward the back side of the substrate, the TSV including a metal substantially surrounded by a liner layer and an insulating layer substantially surrounding the liner layer; etching the back side of the substrate to expose the TSV on the back side of the substrate; and forming a first dielectric layer covering the exposed TSV on the back side of the substrate and extending away from the front side of the substrate.
    Type: Application
    Filed: June 2, 2016
    Publication date: December 7, 2017
    Inventors: Mukta G. Farooq, John A. Fitzsimmons, Anthony K. Stamper
  • Publication number: 20170352618
    Abstract: One aspect of the disclosure relates to an interposer. The interposer may include: a first dielectric layer extending from a substrate in a direction away from a front side of the substrate; a back-end-of-the-line (BEOL) region extending from the substrate in a direction away from the back side of the substrate; a deep trench (DT) capacitor within the substrate and extending toward a back side of the substrate, the DT capacitor having a first portion within the substrate and a second portion within the first dielectric layer; and a through silicon via (TSV) adjacent to the DT capacitor and extending through the first dielectric layer, the substrate, and the BEOL region.
    Type: Application
    Filed: June 2, 2016
    Publication date: December 7, 2017
    Inventors: John A. Fitzsimmons, Mukta G. Farooq, Anthony K. Stamper
  • Patent number: 9818637
    Abstract: Assemblies including a device layer of a silicon-on-insulator (SOI) substrate and a replacement substrate replacing a handle wafer of the SOI substrate, and methods for transferring the device layer of the SOI substrate from the handle wafer to the replacement substrate. A device structure is formed in a first section of the handle wafer, and a second section of the handle wafer adjoining the first section of the handle wafer is removed to expose a surface of the buried dielectric layer of the silicon-on-insulator substrate. A permanent substrate is attached to the surface of the buried dielectric layer. When the permanent substrate is attached to the surface of the buried dielectric layer, the section of the handle wafer is received inside a cavity defined in the permanent substrate.
    Type: Grant
    Filed: December 29, 2015
    Date of Patent: November 14, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons, Mark D. Jaffe, Randy L. Wolf
  • Patent number: 9812404
    Abstract: The disclosure generally relates to semiconductor structures and, more particularly, to electrical connections used with crackstop structures and methods of manufacture. The structure includes: a conductive material; a dielectric material formed over the conductive material; a non-corrosive conductive material in at least one opening of the dielectric material and in direct contact with the conductive material; a crackstop structure formed over the dielectric material; and at least one of wiring layer in contact with the non-corrosive conductive material.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: November 7, 2017
    Assignee: GLOBALFOUNDRIES INC
    Inventors: Michael J. Shapiro, John A. Fitzsimmons, Natalia Borjemscaia
  • Patent number: 9806025
    Abstract: An SOI semiconductor device includes a first wafer having an active semiconductor layer and a first oxide layer and a second wafer having a semiconductor substrate and a second oxide layer, the first oxide layer being bonded to the second oxide layer, and one of the first wafer and the second wafer includes a nitride layer. The nitride layer can be formed between the semiconductor substrate and the second oxide layer. A third oxide layer can be formed on the semiconductor substrate and the nitride layer is formed between the second oxide layer and the third oxide layer. The nitride layer can be formed between the active semiconductor layer and the first oxide layer. The first wafer can include a third oxide layer formed on the active semiconductor layer and the nitride layer is formed between the third oxide layer and the first oxide layer.
    Type: Grant
    Filed: December 29, 2015
    Date of Patent: October 31, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony K. Stamper, Mukta G. Farooq, John A. Fitzsimmons
  • Publication number: 20170229362
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to corrosion resistant chip sidewall connections with crackstop structures with a hermetic seal, and methods of manufacture. The structure includes: a guard ring structure surrounding an active region of an integrated circuit chip; an opening formed in the guard ring structure; and a hermetic seal encapsulating the opening and a portion of the guard ring structure, the hermetic seal being structured to prevent moisture ingress to the active region of the integrated circuit chip through the opening.
    Type: Application
    Filed: February 5, 2016
    Publication date: August 10, 2017
    Inventors: John A. Fitzsimmons, Michael J. Shapiro, Natalia Borjemscaia, Vincent McGahay
  • Publication number: 20170194265
    Abstract: The disclosure generally relates to semiconductor structures and, more particularly, to electrical connections used with crackstop structures and methods of manufacture. The structure includes: a conductive material; a dielectric material formed over the conductive material; a non-corrosive conductive material in at least one opening of the dielectric material and in direct contact with the conductive material; a crackstop structure formed over the dielectric material; and at least one of wiring layer in contact with the non-corrosive conductive material.
    Type: Application
    Filed: December 30, 2015
    Publication date: July 6, 2017
    Inventors: Michael J. Shapiro, John A. Fitzsimmons, Natalia Borjemscaia