Abstract: An apparatus for detecting and compensating for focus errors in a photolithography tool which holds a reticle and a substrate substantially parallel is described. The apparatus includes at least one proximity gauge for determining a first distance between the reticle and the substrate, thereby determining if a focus error condition exists. The apparatus also includes an actuator for adjusting the position of the reticle with respect to the substrate, thereby compensating for the focus error condition. According to another embodiment, a lens system actuator is employed for adjusting a lens system parameter, thereby compensating for the focus error condition detected by the at least one proximity gauge.

Abstract: A system and method for transferring a reticle (201) pattern to a substrate image (203) by scanning. The reticle is placed between an illumination system (118) and the projection lens (117). The substrate is located below the projection lens. A loading system, wafer adjustment system, and focusing system are also disclosed.

Abstract: A device for connecting in series between a source of alternating current power and a direct current load which decouples the power flow from the source to the load and thereby enables efficient modification of the current waveform supplied by the source to reduce current harmonics, improve the current form factor and improve the power factor. Particular uses for the device include battery chargers, off-line switching power supplies as used by computers, electronic ballasts for fluorescent tubes and variable speed electric motor controls.

Abstract: A system and method for transferring a reticle (201) pattern to a substrate image (203) by scanning. The reticle is placed between an illumination system (118) and the projection lens (117). The substrate is located below the projection lens. A loading system, wafer adjustment system, and focusing system are also disclosed.

Abstract: A deep ultraviolet (UV) lens for use in a photolithography system provides enhanced resolution by using shorter wavelengths of light exposure (in the ultraviolet wavelength). The improved lens includes a meniscus and a first mirror for imaging light in the deep ultraviolet range to the meniscus. The meniscus images the light to a plano-convex lens which is located proximately to the concave surface of the meniscus. The lens further includes a pair of optical elements (prisms) proximately located to the plano surface of the plano-convex lens. The present invention provides for operation in the deep ultraviolet range with a aperture in one embodiment of 0.350.

Abstract: A device for connecting in series between a source of electric power and an appliance which, without modifying the normal power connections or other parts of the appliance, isolates the capacitance to ground characteristic of the appliance from the power supply and allows the flow of electrical power to the appliance to be regulated by a mere touch, usually by a human finger, to a surface of the appliance.

Abstract: A laser system for medical applications has at least two lasers and a movable concave reflector. The lasers are capable of generating beams of coherent electromagnetic radiation. One of the beams, an aiming beam, is aligned to impinge the reflector, to reflect therefrom and to impinge a biological specimen. The reflector is moved until the beam is aligned to impinge the desired position. The reflector is held stationary and the second beam is generated. The second beam is also aligned to impinge the reflector to reflect therefrom and to impinge the same desired position as that impinged by the first beam.

Abstract: An electrophoretic separation apparatus of the type described in U.S. Pat. No. 3,844,926 wherein the means for generating the electric field is constituted by an anode system and a cathode system, said systems being positioned on opposite sides of the annular separation chamber to one another and one or both of said systems comprising a semi-permeable membrane which defines the annular separation chamber, at least in part, and which is supported by a water-permeable resin-bonded cellulose fibre material, means for contacting said material with an electrolyte, and an electrode for supplying an electric current to the electrolyte.