Patents by Inventor John A. Korbler

John A. Korbler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190006205
    Abstract: A system, apparatus, and method for processing substrates using acoustic energy. In one aspect, the invention can be a system for processing flat articles including a support for supporting the flat article and an acoustic energy treatment apparatus. The acoustic energy treatment apparatus may include a support arm and a plurality of transducer assemblies coupled thereto. The transducer assemblies may include a housing with a transducer coupled thereto, and the housings of the transducer assemblies may be arranged in an end-to-end manner. A trough may also be included that extends along at least a portion of a length of the transducer assemblies. The trough may serve as a reservoir that upon being filled and overflowed with a liquid allows the liquid to fluidly couple the transducer assemblies to the flat article.
    Type: Application
    Filed: August 21, 2018
    Publication date: January 3, 2019
    Inventors: John A. Korbler, Carlos M. Ruiz, Michael Ioannou, Hongseong Son
  • Patent number: 10079164
    Abstract: A system, apparatus, and method for processing substrates using acoustic energy. In one aspect, the invention can be a system for processing flat articles including a support for supporting the flat article and an acoustic energy treatment apparatus. The acoustic energy treatment apparatus may include a support arm and a plurality of transducer assemblies coupled thereto. The transducer assemblies may include a housing with a transducer coupled thereto, and the housings of the transducer assemblies may be arranged in an end-to-end manner. A trough may also be included that extends along at least a portion of a length of the transducer assemblies. The trough may serve as a reservoir that upon being filled and overflowed with a liquid allows the liquid to fluidly couple the transducer assemblies to the flat article.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: September 18, 2018
    Inventors: John A. Korbler, Carlos M. Ruiz, Michael Ioannou, Hongseong Son
  • Patent number: 9987666
    Abstract: An apparatus for processing articles with acoustic energy and a method of constructing a transducer that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is a method of constructing a device for generating acoustic energy comprising: providing a layer of supporting material; positioning a piezoelectric material atop the layer of adhesive material; cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and filling the spaces with a resilient material to form a composite assembly.
    Type: Grant
    Filed: June 1, 2015
    Date of Patent: June 5, 2018
    Inventors: John A. Korbler, Richard Novak
  • Patent number: 9305768
    Abstract: A method for processing flat articles with acoustical energy. The inventive system method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: April 5, 2016
    Inventors: Fani Pejman, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20150258583
    Abstract: An apparatus for processing articles with acoustic energy and a method of constructing a transducer that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is a method of constructing a device for generating acoustic energy comprising: providing a layer of supporting material; positioning a piezoelectric material atop the layer of adhesive material; cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and filling the spaces with a resilient material to form a composite assembly.
    Type: Application
    Filed: June 1, 2015
    Publication date: September 17, 2015
    Inventors: John A. Korbler, Richard Novak
  • Patent number: 9049520
    Abstract: An apparatus and method for processing articles utilizing acoustic energy. In one embodiment, the invention is an apparatus comprising a support; a conduit for applying a fluid to a surface of the article; and a transducer assembly comprising: a transmitting structure having a concave inner surface and a convex outer surface; a first acoustic transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, wherein the first acoustic transducer is configured to create a first acoustically active area on the convex outer surface of the transmitting structure when the first acoustic transducer is energized; and a second acoustic transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, wherein the second acoustic transducer is configured to create a second acoustically active area on the convex outer surface of the transmitting structure when the second acoustic transducer is energized.
    Type: Grant
    Filed: May 19, 2014
    Date of Patent: June 2, 2015
    Inventors: John A. Korbler, Richard Novak
  • Publication number: 20150075562
    Abstract: A system, apparatus, and method for processing substrates using acoustic energy. In one aspect, the invention can be a system for processing flat articles including a support for supporting the flat article and an acoustic energy treatment apparatus. The acoustic energy treatment apparatus may include a support arm and a plurality of transducer assemblies coupled thereto. The transducer assemblies may include a housing with a transducer coupled thereto, and the housings of the transducer assemblies may be arranged in an end-to-end manner. A trough may also be included that extends along at least a portion of a length of the transducer assemblies. The trough may serve as a reservoir that upon being filled and overflowed with a liquid allows the liquid to fluidly couple the transducer assemblies to the flat article.
    Type: Application
    Filed: September 18, 2014
    Publication date: March 19, 2015
    Inventors: John A. Korbler, Carlos M. Ruiz, Michael Ioannou, Hongseong Son
  • Publication number: 20140254325
    Abstract: An apparatus and method for processing articles utilizing acoustic energy. In one embodiment, the invention is an apparatus comprising a support; a conduit for applying a fluid to a surface of the article; and a transducer assembly comprising: a transmitting structure having a concave inner surface and a convex outer surface; a first acoustic transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, wherein the first acoustic transducer is configured to create a first acoustically active area on the convex outer surface of the transmitting structure when the first acoustic transducer is energized; and a second acoustic transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, wherein the second acoustic transducer is configured to create a second acoustically active area on the convex outer surface of the transmitting structure when the second acoustic transducer is energized.
    Type: Application
    Filed: May 19, 2014
    Publication date: September 11, 2014
    Applicant: Akrion Systems LLC
    Inventors: John A. Korbler, Richard Novak
  • Publication number: 20140216508
    Abstract: A system, apparatus and method for processing substrates using acoustic energy. In one aspect, the invention can be a system for processing flat articles comprising: a support supporting a flat article; a dispenser applying liquid to a first surface of the flat article; a transducer assembly comprising: a transmitting structure having a longitudinal axis; a first set of transducers acoustically coupled to the transmitting structure in a spaced apart manner on a first side of the longitudinal axis; a second set of transducers acoustically coupled to the transmitting structure in a spaced apart manner on a second side of the longitudinal axis; the transducers of the first and second sets staggered along the longitudinal axis; and wherein when the dispenser applies liquid to the first surface of the flat article, a film of liquid is formed between the transmitting structure and the first surface of the flat article.
    Type: Application
    Filed: February 3, 2014
    Publication date: August 7, 2014
    Applicant: Akrion Systems LLC
    Inventor: John A. Korbler
  • Publication number: 20130333723
    Abstract: A method for processing flat articles with acoustical energy. The inventive system method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Application
    Filed: November 27, 2012
    Publication date: December 19, 2013
    Applicant: Akrion Systems, LLC
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20130167881
    Abstract: An apparatus for processing articles with acoustic energy and a method of constructing a transducer that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is a method of constructing a device for generating acoustic energy comprising: providing a layer of supporting material; positioning a piezoelectric material atop the layer of adhesive material; cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and filling the spaces with a resilient material to form a composite assembly.
    Type: Application
    Filed: October 2, 2012
    Publication date: July 4, 2013
    Inventors: John A. Korbler, Richard Novak
  • Patent number: 8316869
    Abstract: A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Grant
    Filed: August 30, 2010
    Date of Patent: November 27, 2012
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Patent number: 8279712
    Abstract: A transducer, system and method of constructing the same that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is an apparatus for generating acoustic energy comprising: a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form a composite assembly.
    Type: Grant
    Filed: November 6, 2008
    Date of Patent: October 2, 2012
    Inventors: John A. Korbler, Richard Novak
  • Publication number: 20100326464
    Abstract: A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Application
    Filed: August 30, 2010
    Publication date: December 30, 2010
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Patent number: 7836769
    Abstract: An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.
    Type: Grant
    Filed: August 10, 2007
    Date of Patent: November 23, 2010
    Inventor: John Korbler
  • Patent number: 7784478
    Abstract: A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: August 31, 2010
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20090231959
    Abstract: A transducer, system and method of constructing the same that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is an apparatus for generating acoustic energy comprising: a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form a composite assembly.
    Type: Application
    Filed: November 6, 2008
    Publication date: September 17, 2009
    Inventors: John A. Korbler, Richard Novak
  • Publication number: 20080034875
    Abstract: An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.
    Type: Application
    Filed: August 10, 2007
    Publication date: February 14, 2008
    Inventor: John Korbler
  • Publication number: 20070169800
    Abstract: A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively.
    Type: Application
    Filed: January 22, 2007
    Publication date: July 26, 2007
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20060260638
    Abstract: A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.
    Type: Application
    Filed: March 8, 2006
    Publication date: November 23, 2006
    Inventors: Pejman Fani, Ismail Kashkoush, John Korbler, Vivek Vohra, Alan Walter