Abstract: An optical system and design can image objects under inspection in the ultraviolet (UV) and visible spectrums. This imaging can be used to detect both large defects in the visible spectrum and small defects in the UV spectrum in a single pass while reducing the time and cost of the inspection process. The optical system may include an off-axis reflective focusing system for aberration correction with a beamsplitter to separate the visible spectrum from the UV wavelengths. Cameras may then image visible and UV wavelengths.

Abstract: A multichannel tunable lens system may include a review channel with a fluidic focusing device, which can adjust the focus of the channel rapidly to mitigate environmental vibrations. The review channel may generate high resolution images with reduced blur caused by vibrations or air turbulence while increasing the operating speed of the system. The review channel may include a telescope objective and eyepiece with telecentricity to generate a real image of the pupil in the fluidic focusing device. The system may also include an inspection channel to generate lower resolution images in parallel and a focus channel to determine contour information.

Abstract: A cooling system includes a first dewar configured to house a first optical imaging device, a second dewar configured to house a second optical imaging device, and a Stirling cycle refrigerator. The Stirling cycle refrigerator can include a compressor, a first expander in fluid communication with the compressor and in thermal communication with the first dewar, and a second expander in fluid communication with the compressor and in thermal communication with the second dewar.

Abstract: An infrared spectrometer includes an entrance slit and a collimating optical element aligned with the entrance slit. A diffractive optical element is optically coupled to the collimating optical element. A focusing optical element optically coupled to the diffractive optical element. A detector array is optically coupled to the focusing optical element. A linear variable filter (LVF) is optically coupled between the focusing optical element and the detector array. A method for filtering a baseline signal emitted from spectrometer components in the infrared spectrometer assembly includes transmitting radiation into a spectrometer and passing the radiation through the LVF to filter the baseline signal being emitted from spectrometer components. The method includes receiving the radiation in the detector array.

Abstract: A cooling system includes a first dewar configured to house a first optical imaging device, a second dewar configured to house a second optical imaging device, and a Stirling cycle refrigerator. The Stirling cycle refrigerator can include a compressor, a first expander in fluid communication with the compressor and in thermal communication with the first dewar, and a second expander in fluid communication with the compressor and in thermal communication with the second dewar.

Abstract: An apparatus for processing optical signals includes a cladding material having therein at least two elongate core regions which serve as respective waveguides. A coupling portion therein includes adjacent and parallel portions of the two waveguides which extend sufficiently closely for a sufficient distance to permit coupling of radiation between these waveguide portions. Structure is provided that respectively permits and frustrates such coupling for respective component signals having respective different wavelengths. The coupling portion may optionally include an externally controlled switching section that can have a selected one of two states in which is respectively transmissive and nontransmissive to radiation.

Abstract: An offset reverse telephoto projection lens that is telecentric in modulator space and has an air equivalent back focal distance of at least 3.3 inches and preferably at least 4.0 inches. The lens comprising, from the image side, a first objective lens group 408 having a negative power and a second telecentric lens group having a positive power. The second telecentric lens group 410 is telecentric in object space such that the image of the aperture is focused at infinity and light converges on the object plane perpendicular to the axis of the lens. Embodiments of the lens have a back focal distance to effective focal length ratio of at least 0.86:1, preferably at least 1.2:1, more preferably at least 1.3:1, still more preferably at least 4.08:1, and most preferably 5.0:1. The embodiments described have a field of view between 14 degrees and 73 degrees, have throw ratios of 1.2:1 to 7:1, and an overall length ranging from less than 5 inches to 12.5 inches.