Patents by Inventor John Aaron Mucha

John Aaron Mucha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing integrated circuit devices
    Patent number: 6207570
    Abstract: A method for manufacturing integrated circuit apparatuses; particularly, 1) a method for removing barrier material that lies between copper conductors in damascene interconnections, and 2) a method for removing a thin layer of silicon nitride material that has been intentionally un-etched during the formation of trenches and vias in damascene interconnect dielectric and thereby not exposing copper metal.
    Type: Grant
    Filed: August 20, 1999
    Date of Patent: March 27, 2001
    Assignee: Lucent Technologies, Inc.
    Inventor: John Aaron Mucha