Patents by Inventor John Adamik

John Adamik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Extraction electrode manipulator
    Patent number: 7842931
    Abstract: An extraction electrode manipulator system, comprising an ion source, a suppression electrode and a ground electrode, wherein the two electrode are supported by coaxially arranged two water cooled support tubes. A high voltage insulator ring is located on the other end of the coaxial support tube system to act as a mechanical support of the inner tube and also as a high voltage vacuum feedthrough to prevent sputtering and coating of the insulating surface.
    Type: Grant
    Filed: September 25, 2008
    Date of Patent: November 30, 2010
    Assignee: Axcelis Technologies, Inc.
    Inventors: Shu Satoh, John Adamik, Manny Sieradzki
  • EXTRACTION ELECTRODE MANIPULATOR
    Publication number: 20100072402
    Abstract: An extraction electrode manipulator system, comprising an ion source, a suppression electrode and a ground electrode, wherein the two electrode are supported by coaxially arranged two water cooled support tubes. A high voltage insulator ring is located on the other end of the coaxial support tube system to act as a mechanical support of the inner tube and also as a high voltage vacuum feedthrough to prevent sputtering and coating of the insulating surface.
    Type: Application
    Filed: September 25, 2008
    Publication date: March 25, 2010
    Applicant: Axcelis Technologies, Inc.
    Inventors: Shu Satoh, John Adamik, Manny Sieradzki