Patents by Inventor John C. Pagano

John C. Pagano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer grinding machine
    Patent number: 5679060
    Abstract: The wafer grinding machine uses a centrally located robot to move a wafer from an input station to a measuring station. Thereafter, the wafer is moved into a grind station and a wash station sequentially. The robot is able to move a wafer from the wash station to either the measuring station for after-grinding measurements or directly to an output station. During grinding of one wafer, a second wafer may be held between the measuring station and the grind station while a ground wafer is moved from the wash station to the measuring station for after-grinding measurements.
    Type: Grant
    Filed: October 30, 1995
    Date of Patent: October 21, 1997
    Assignee: Silicon Technology Corporation
    Inventors: Thomas E. Leonard, John C. Pagano