Abstract: A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.

Abstract: A process of converting a tetrahalosilane into a trihalosilane is provided that includes: diluting the tetrahalosilane with hydrogen (H2) to form a mixture; and passing the mixture through a bed of heated oxide particles to convert the tetrahalosilane into the trihalosilane.

Abstract: A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.

Abstract: This invention is directed to a method and apparatus of delaying the reaction between a first reactive gas and a second reactive gas as the first reactive gas flows into the second reactive gas. The method comprises the steps of surrounding the first reactive gas with a non-reactive gas to form an insulated first reactive gas; and flowing the insulated first reactive gas into the second reactive gas. A sweep gas is used to impart momentum to the insulated first reactive gas. The apparatus comprises three coaxial tubular members which are used to introduce the first reaction gas, the non-reactive gas, and the sweep gas. The apparatus may be installed in a semiconductor device fabrication process either just upstream of the house exhaust line or upstream of an ODC or air pollution abatement device.

Abstract: This invention is directed to a method and apparatus of delaying the reaction between a first reactive gas and a second reactive gas as the first reactive gas flows into the second reactive gas. The method comprises the steps of surrounding the first reactive gas with a non-reactive gas to form an insulated first reactive gas; and flowing the insulated first reactive gas into the second reactive gas. A sweep gas is used to impart momentum to the insulated first reactive gas. The apparatus comprises three coaxial tubular members which are used to introduce the first reaction gas, the non-reactive gas, and the sweep gas. The apparatus may be installed in a semiconductor device fabrication process either just upstream of the house exhaust line or upstream of an ODC or air pollution abatement device.

Abstract: This invention is directed to a method and apparatus of delaying the reaction between a first reactive gas and a second reactive gas as the first reactive gas flows into the second reactive gas. The method comprises the steps of surrounding the first reactive gas with a non-reactive gas to form an insulated first reactive gas; and flowing the insulated first reactive gas into the second reactive gas. A sweep gas is used to impart momentum to the insulated first reactive gas. The apparatus comprises three coaxial tubular members which are used to introduce the first reaction gas, the non-reactive gas, and the sweep gas. The apparatus may be installed in a semiconductor device fabrication process either just upstream of the house exhaust line or upstream of an ODC or air pollution abatement device.

Abstract: A system for containing and detoxifying a gaseous stream, comprising a storage housing containing one or more sources of toxic gas, means for applying negative pressure to the storage housing to continuously exhaust a gaseous stream therefrom, and a treatment housing interposed in the gaseous stream, the treatment housing containing one or more layers of solid sorbent material capable of removing the toxic gas from the stream, wherein a flow of treated gas that exits the treatment unit may be safely released to the environment.

Abstract: A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

Abstract: An apparatus and process for adsorbing volatile organic compounds, or VOCs, and efficiently regenerating adsorbent material in an emission control system. Flue gas, emitted from a combustion unit burning an outside fuel and desorbed VOCs, is humidified and cooled with a set of water injectors. The resultant humidified flue gas is directed through the adsorbent material, which is rapidly superheated without pressurization. A method for controlling the regeneration cycle of the emission control system includes at least three sensor configurations including a breakthrough sensor, a desorbed gas sensor and a flue gas temperature sensor.

Abstract: Production of epitaxial silicon by thermal decomposition or hydrogen reduction of bromosilanes or iodosilane is disclosed.

Abstract: A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

Abstract: An energy efficient process is disclosed for the continuous production of semiconductor matrices formed from electrodepositing doped silicon or germanium films on metallic sheet substrates. The energy released from such electrodeposition can then be used to regenerate the anode material used in the electrodepositing position.

Abstract: The gas inlet tube and the outlet tube in the upper end of a "bubbler" container are each sealed with an easily breakable wall adjacent the wall where the tubes join the container. A second seal is formed on the outer ends of the tubes creating a compartment in which may be positioned a small hammer. The outer seals are sufficient to meet safety regulations regarding the shipment of highly corrosive or poisonous materials. The user of the material, breaks the outer seals, positions the hammer if not already in place, makes the desired connections to the tubes, applies a purging gas to the upper ends of the tubes, and breaks the inner seals by magnetically or otherwise actuating the hammer resting on the inner seal, thereby connecting the material to the desired system without exposing the material to the atmosphere.

Abstract: An energy efficient process is disclosed for the continuous production of semiconductor matrices formed from depositing doped silicon or germanium films on metallic sheet substrates. The energy released from such deposition can then be used to regenerate the anode material used in the deposition.

Abstract: A bubbler system utilizing interconnected dual-chambers forming a series path for a carrier gas thereby rendering useful in excess of 90 percent of the material contained therein. The inlet and outlet ports of the bubbler system are provided with an inner and outer seal, creating a compartment in which may be positioned a small hammer. The user of the system removes the outer seals, makes desired connections to the ports, and thereby connects the bubbler to a using system without exposing the material to the atmosphere.

Abstract: The gas inlet tube and the outlet tube in the upper end of a "bubbler" container are each sealed with an easily breakable wall adjacent the wall where the tubes join the container. A second seal is formed on the outer ends of the tubes creating a compartment in which may be positioned a small hammer. The outer seals are sufficient to meet safety regulations regarding the shipment of highly corrosive or poisonous materials. The user of the material, breaks the outer seals, positions the hammer if not already in place, makes the desired connections to the tubes, applies a purging gas to the upper ends of the tubes, and breaks the inner seals by magnetically or otherwise actuating the hammer resting on the inner seal, thereby connecting the material to the desired system without exposing the material to the atmosphere.