Abstract: The invention involves tunneling tips to their conducting surface, and specifically the deposition of a monolayer of fullerene C60 onto the conducting plate surface to protect the tunneling tip from contact. The Fullerene C60 molecule is approximately spherical, and a monolayer of fullerene has a thickness of one nanometer, such that a monolayer thereby establishing the theoretical distance desired between the MEMS' tunneling tip and the conducting plate. Exploiting the electrical conductivity of C60, the tip can be accurately positioned by simply monitoring conductivity between the fullerene and the tunneling tip. By monitoring the conductivity between the tip and the fullerene layer as the tip is brought in proximity, the surfaces can be brought together without risk of contacting the underlying conducting surface.

Abstract: A flow control valve is disclosed wherein a housing defines a flow chamber with an inlet and an outlet. Disposed within the flow chamber is a poppet assembly comprising an inner poppet and an outer poppet. A first spring is selected to bias the outer poppet to seal closed the inlet below a predetermined fluid flow rate. Above the fluid flow rate, the force of the fluid against the outer poppet compresses the spring, breaking the seal and allowing fluid to flow into the fluid flow chamber. Inside the outer poppet is an inner poppet which extends from the outer poppet. A second spring biases the inner poppet predominantly within the outer poppet, but an increased pressure inside the outer poppet collapses the second spring and extends the inner poppet in a fully extended position. Fully extended the inner poppet shuts the outlet of the fluid chamber thereby arresting the flow.

Abstract: An ultrasensitive displacement sensing device for use in accelerometers, pressure gauges, temperature transducers, and the like, comprises a sputter deposited, multilayer, magnetoresistive field sensor with a variable electrical resistance based on an imposed magnetic field. The device detects displacement by sensing changes in the local magnetic field about the magnetoresistive field sensor caused by the displacement of a hard magnetic film on a movable microstructure. The microstructure, which may be a cantilever, membrane, bridge, or other microelement, moves under the influence of an acceleration a known displacement predicted by the configuration and materials selected, and the resulting change in the electrical resistance of the MR sensor can be used to calculate the displacement. Using a micromachining approach, very thin silicon and silicon nitride membranes are fabricated in one preferred embodiment by means of anisotropic etching of silicon wafers.

Abstract: A flow control valve is disclosed wherein a housing defines a flow chamber with an inlet and an outlet. Disposed within the flow chamber is a poppet assembly comprising an inner poppet and an outer poppet. A first spring is selected to bias the outer poppet to seal closed the inlet below a predetermined fluid flow rate. Above the fluid flow rate, the force of the fluid against the outer poppet compresses the spring, breaking the seal and allowing fluid to flow into the fluid flow chamber. Inside the outer poppet is an inner poppet which extends from the outer poppet. A second spring biases the inner poppet predominantly within the outer poppet, but an increased pressure inside the outer poppet collapses the second spring and extends the inner poppet in a fully extended position. Fully extended the inner poppet shuts the outlet of the fluid chamber thereby arresting the flow.

Abstract: A flow control valve is disclosed wherein a housing defines a flow chamber with an inlet and an outlet. Disposed within the flow chamber is a telescoping poppet comprising an inner poppet and an outer poppet. A first spring is selected to bias the outer poppet to seal closed the inlet below a predetermined fluid flow rate. Above the fluid flow rate, the force of the fluid against the outer poppet compresses the spring, breaking the seal and allowing fluid to flow into the fluid flow chamber. Inside the outer poppet is an inner poppet which telescopes from the outer poppet. A second spring biases the inner poppet predominantly within the outer poppet, but an increased pressure in the outer poppet collapses the second spring and extends the inner poppet in a fully extended position. Fully extended the inner poppet seals shut the outlet of the fluid chamber. In operation, the first spring shuts the valve below a predetermined flow rate guaranteeing zero flow until a minimum flow rate is present.

Abstract: The invention involves a method for locating the probe of a scanning tunneling micrograph a predetermined distance from its conducting surface, and specifically the deposition of a monolayer of fullerene C60 onto the conducting plate. The Fullerene C60 molecule is approximately spherical, and a monolayer of fullerene has a thickness of one nanometer. By providing a monolayer of fullerene on the conducting surface and locating the probe on the surface of the monolayer, a distance of one nanometer can be established between the probe tip and the conducting surface.

Abstract: A mechanical leak arresting valve is disclosed in which fluid through the valve is limited to a range between a predetermined minimum flow rate and a predetermined maximum flow rate, and where both a small or large downstream leak mechanically causes the valve to lock closed. The present invention uses a locking mechanism triggered by a pressure differential resulting from the downstream leak to block the flow of fluid through the valve until the fluid source upstream is stopped. Reduction of the upstream pressure by the stopping of the fluid source automatically resets the valve without further manipulation.