Abstract: A dual-coplanar sensor architecture is constructed by launching from coaxial airline to a unique arrangement of coplanar waveguides, arranged symmetrically on both sides of a thin dielectric substrate. The center conductor of the coaxial airline makes electrical contact with the middle conductor of both the top and bottom coplanar waveguides. The characteristic impedance of the top and bottom coplanar waveguides is designed to be approximately twice the characteristic impedance of the coaxial airline, such that the parallel combination of the two coplanar waveguides is the characteristic impedance of the coaxial airline. Further, steps in both the ground planes and center conductor at the point of transition from coaxial to coplanar are used to tune the launch and minimize reflection at the launch.

Abstract: A co-axial microwave bolometer architecture is disclosed that uses thick-film processes to construct very small thermistors on a substrate that is selected for low heat transfer. Thermal isolation is further enhanced by making the planar electrodes from a metal with lower heat transfer than typical electrical metals. Furthermore, a resistor with very strong temperature coefficient (thermistor), is arranged such that connecting metal paths are arranged axially, and as generally flat, thin, planar conductors. Additionally, the substrate of the thermistor is selected to have very low conductivity of heat, so the thermistor element itself is well isolated thermally from its surroundings.

Abstract: A dual-coplanar sensor architecture is constructed by launching from coaxial airline to a unique arrangement of coplanar waveguides, arranged symmetrically on both sides of a thin dielectric substrate. The center conductor of the coaxial airline makes electrical contact with the middle conductor of both the top and bottom coplanar waveguides. The characteristic impedance of the top and bottom coplanar waveguides is designed to be approximately twice the characteristic impedance of the coaxial airline, such that the parallel combination of the two coplanar waveguides is the characteristic impedance of the coaxial airline. Further, steps in both the ground planes and center conductor at the point of transition from coaxial to coplanar are used to tune the launch and minimize reflection at the launch.

Abstract: A co-axial microwave bolometer architecture is disclosed that uses thick-film processes to construct very small thermistors on a substrate that is selected for low heat transfer. Thermal isolation is further enhanced by making the planar electrodes from a metal with lower heat transfer than typical electrical metals. Furthermore, a resistor with very strong temperature coefficient (thermistor), is arranged such that connecting metal paths are arranged axially, and as generally flat, thin, planar conductors. Additionally, the substrate of the thermistor is selected to have very low conductivity of heat, so the thermistor element itself is well isolated thermally from its surroundings.

Abstract: A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe (8) is connected to an RF transmission line for receiving and measuring voltage (10) and current signals (12) from the transmission line (4). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.

Abstract: A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe (8) is connected to an RF transmission line for receiving and measuring voltage (10) and current signals (12) from the transmission line (4). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.

Abstract: A VSWR meter and alarm device that produces an alarm when an undesirable VSWR is sensed on an RF transmission line. This device uses a single-arm directional coupler and detectors operating at least 15 dB into the “square law region” at full power. The single-arm directional coupler is capable of sensing the forward voltage wave and reflected voltage wave from a transmission line. The coupler isolates the forward and reflected voltages and each is converted into a direct current (dc) signal by a full-wave detector. Attenuator circuits are utilized between the coupler and detectors so that the detectors operate at least 15 dB into the “square-law region” at full power. The dc signals representing the forward and reflected voltages are then amplified and transformed into respective digital signals by a digital-to-analog converter. The digital signals are then transmitted to a microprocessor which operates an alarm system.

Abstract: A power meter and VSWR alarm device that produces an alarm when an undesirable VSWR is sensed on an RF transmission line. This device uses a single-arm directional coupler and detectors operating at least 15 dB below the “square law region” threshold at full power. The single-arm directional coupler is capable of sensing the forward voltage wave and reflected voltage wave from a transmission line. The coupler isolates the forward and reflected voltages and each is converted into a direct current (dc) signal by a full-wave detector. Attenuator circuits are utilized between the coupler and detectors so that the detectors operate at least 15 dB below the threshold of the “square-law region” at full power. The dc signals representing the forward and reflected voltages are then amplified and transformed into respective digital signals by a digital-to-analog converter. The digital signals are then transmitted to a microprocessor which operates an alarm system.

Abstract: An antenna tester has a signal generator that produces a test signal applied to the antenna and a reference signal; the test signal and reference signals having a shared noise modulated characteristic; a circuit for detecting a reflected test signal from the antenna in response to the test signal; and a demodulator circuit for demodulating the reflected test signal and reference signal based on the noise characteristic to produce first and second output signals; the first and second output signals having detectable characteristics related to the antenna impedance characteristics.