Patents by Inventor John Douglas Busch

John Douglas Busch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR SPUTTERING FOR PROCESSES WITH A PRE-STABILIZED PLASMA
    Publication number: 20150136585
    Abstract: A method of depositing a layer of a material on a substrate is described. The method includes igniting a plasma of a sputter target for material deposition while the substrate is not exposed to the plasma, maintaining the plasma at least until exposure of the substrate to the plasma for deposition of the material on the substrate, exposing the substrate to the plasma by moving at least one of the plasma and the substrate, and depositing the material on the substrate, wherein the substrate is positioned for a static deposition process.
    Type: Application
    Filed: June 1, 2012
    Publication date: May 21, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventor: John Douglas Busch