Patents by Inventor John F. Loughran

John F. Loughran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for generating inspection patterns
    Patent number: 4581537
    Abstract: A method of forming inspection patterns for inspecting a workpiece, e.g., for electron beam inspection of optical photomasks. The inspection patterns are formed from the workpiece patterns themselves by applying a first positive windage to the workpiece patterns, inverting the first positive windaged workpiece patterns and applying a second positive windage to the inverted first positive windaged workpiece patterns. The inspection patterns so produced will contain the requisite guard band and the requisite overlap of abutting patterns.
    Type: Grant
    Filed: March 23, 1984
    Date of Patent: April 8, 1986
    Assignee: International Business Machines Corporation
    Inventors: Wallace J. Guillaume, John F. Loughran, Jan Rogoyski, Robert A. Simpson, Edward V. Weber