Patents by Inventor John F. Ostrowski

John F. Ostrowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dynamic chuck for semiconductor wafer or other substrate
    Patent number: 6167893
    Abstract: A dynamic chuck for holding a semiconductor wafer or other substrate includes a plurality of clamping arms mounted radially about a central axis of rotation of the wafer or other substrate. Each of the arms is mounted such that it is free to pivot about a horizontal axis. As the chuck rotates the substrate, a centrifugal force acts on each of the arms, causing it to pivot about its axis of rotation and thereby forcing a holding surface of the arm against a peripheral edge of the substrate. The dynamic chuck is applicable to any type of device in which a semiconductor wafer or other substrate must be held in a centered positioned while it is being spun, including wafer cleaning and rinsing apparatus.
    Type: Grant
    Filed: February 9, 1999
    Date of Patent: January 2, 2001
    Assignee: Novellus Systems, Inc.
    Inventors: Steven W. Taatjes, John F. Ostrowski