Patents by Inventor John Ferdinand MAGANA

John Ferdinand MAGANA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240053281
    Abstract: The present disclosure is directed to a reticle assembly having a reticle and a pellicle attached to a pellicle support frame positioned on the reticle and includes a sensor assembly having optical and sensor components, which monitor the pellicle. The optical components and the sensor components of the sensor assembly may be coupled to a controller, which may be further coupled to one or more semiconductor process tools.
    Type: Application
    Filed: August 9, 2022
    Publication date: February 15, 2024
    Inventors: John Ferdinand MAGANA, Guojing ZHANG
  • Publication number: 20230367204
    Abstract: The present disclosure is directed to a reinforcement system including: a framed pellicle including: a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame; and an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the framed pellicle and the pellicle frame.
    Type: Application
    Filed: May 13, 2022
    Publication date: November 16, 2023
    Inventors: Lance C. HIBBELER, John Ferdinand MAGANA, Chytra PAWASHE