Abstract: A method includes modulating, by a phase light modulator (PLM), incident light to produce background image illumination comprising background image light and zero-order light that is directed towards a first lens array; projecting, by the first lens array, the background image light towards a second lens array; projecting, through an optical tunnel extending between the first lens array and the second lens array, the zero-order light towards an embedded lens in the second lens array; projecting, by the second lens array, the background image light towards focusing optics; projecting, by the embedded lens, the zero-order light towards the focusing optics; focusing, by the focusing optics, light comprising the background image light and the zero-order light towards a spatial light modulator (SLM); and modulating, by the SLM, the focused light to project an image.

Abstract: An apparatus includes a phase light modulator (PLM) configured to produce background image illumination including background image light and zero-order light, a first lens array including first lenses optically coupled to the PLM and configured to project the background image light, a second lens array optically coupled to the first lens array and including second lenses configured to project the background image light, an optical tunnel extending between the first lens array and the second lens array, optically coupled to the PLM and configured to project a zero-order light, an embedded lens in the second lens array optically coupled to the optical tunnel and configured to focus the zero-order light from the optical tunnel, and focusing optics optically coupled to the second lens array and the embedded lens and configured to focus the background image light and the zero-order light onto a background image plane of a spatial light modulator.

Abstract: An apparatus includes a phase light modulator (PLM) configured to produce background image illumination including background image light and zero-order light, a first lens array including first lenses optically coupled to the PLM and configured to project the background image light, a second lens array optically coupled to the first lens array and including second lenses configured to project the background image light, an optical tunnel extending between the first lens array and the second lens array, optically coupled to the PLM and configured to project a zero-order light, an embedded lens in the second lens array optically coupled to the optical tunnel and configured to focus the zero-order light from the optical tunnel, and focusing optics optically coupled to the second lens array and the embedded lens and configured to focus the background image light and the zero-order light onto a background image plane of a spatial light modulator.

Abstract: The present invention relates to a folded front end unit used in a light engine of a projection display device. The front end unit comprises a light source for generating a beam of light, and a lightpipe for providing spatial uniformity to the beam of light. Polarization-dependent front end units include polarization beam splitters for separating the light into orthogonally polarized sub-beams, and a polarization rotating element, e.g. a waveplate, for rotating the polarization of one of the sub-beams. In accordance with the present invention, a prism is positioned between the light source and the lightpipe for reflecting the light into the lightpipe. The difference in refractive index between the air and the prism decreases the cone angle of the beam of light enough to effectively increase the distance between the light source and the lightpipe to compensate for the added distance required to fold the light.

Abstract: The present invention relates to a folded front end unit used in a light engine of a projection display device. The front end unit comprises a light source for generating a beam of light, and a lightpipe for providing spatial uniformity to the beam of light. Polarization-dependent front end units include polarization beam splitters for separating the light into orthogonally polarized sub-beams, and a polarization rotating element, e.g. a waveplate, for rotating the polarization of one of the sub-beams. In accordance with the present invention, a prism is positioned between the light source and the lightpipe for reflecting the light into the lightpipe. The difference in refractive index between the air and the prism decreases the cone angle of the beam of light enough to effectively increase the distance between the light source and the lightpipe to compensate for the added distance required to fold the light.

Abstract: A photoresist composition comprising at least one acetal polymer having a silicon substituent; provided that the silicon substituent is not directly attached to the acetal functionality, thereby providing high resolution, improved DOF, and improved dimensional stability under metrology conditions.

Abstract: A photoresist composition comprising at least one acetal polymer having a silicon substituent; provided that the silicon substituent is not directly attached to the acetal functionality, thereby providing high resolution, improved DOF, and improved dimensional stability under metrology conditions.

Abstract: A photosensitive resist composition comprising: