Abstract: A Raman-based spatial analysis method of detecting surface flaws. Special filters and optics are used to acquire filtered Raman response data from a portion of the surface. The filtered Raman response data represents the Raman response of the surface at a selected frequency. A camera records the response, thereby providing a two dimensional image of the portion of the surface. The image may be analyzed to determine whether that portion has desired thickness and chemical characteristics.

Abstract: A method of controlling a pulsed laser deposition process. A spectroscope is used to acquire Raman response data from a substrate as it is being coated with a film. A processor compares the response data to reference data, which may represent an uncoated substrate or an ideal film. In the former case, the attenuation of the response signal is used to indicate film thickness. In the former case, the peak characteristics of the film can be used to indicate its chemical properties. The processor may be further programmed to compare deposition rates, reaction rates, and transport rates to model data. The processor makes decisions regarding equipment control based on these comparisons. It may access heuristic rules to aid in decision making where several factors are involved.