Patents by Inventor John Franka

John Franka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of removing contaminants
    Patent number: 5300187
    Abstract: Contaminants are removed from a semiconductor material by heating the semiconductor material to temperature within the range of a minimum temperature where a halogen compound will decompose to halogen atoms without the use of ultraviolet irradiation and react with contaminants present on the semiconductor material and a maximum temperature of 800.degree. C., wherein less than or equal to approximately 50 Angstroms of oxide is formed on the semiconductor material. The ambient in which the semiconductor material is heated is an ambient comprised of a nonreactive gas and a halogen compound for at least a time sufficient to remove a substantial amount of contaminants from the semiconductor material.
    Type: Grant
    Filed: September 3, 1992
    Date of Patent: April 5, 1994
    Assignee: Motorola, Inc.
    Inventors: Israel A. Lesk, Young Limb, Philip J. Tobin, John Franka, Paul T. Lin, Jonathan C. Dahm, Gary L. Huffman, Bich-Yen Nguyen