Patents by Inventor John G. North

John G. North has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers
    Patent number: 7521089
    Abstract: Method and apparatus for controlling the migration of reaction by-product gases from a chemical vapor deposition (CVD) process chamber to a transfer vacuum chamber shared by other process chambers. Separate regulated flows of purge gas are provided to the CVD process chamber and the transfer vacuum chamber before establishing a pathway for substrate transfer. A pressure differential is created between the transfer vacuum chamber and the CVD process chamber that reduces or prevents the migration of CVD reaction by-product gases arising from the establishment of the substrate transfer pathway. While the pathway is established, a directional flow of purge gas is maintained from the transfer vacuum chamber into the CVD process chamber.
    Type: Grant
    Filed: June 13, 2002
    Date of Patent: April 21, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Joseph T. Hillman, John G. North, Steven P. Caliendo, John J. Hautala
  • Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers
    Publication number: 20030230322
    Abstract: Method and apparatus for controlling the migration of reaction by-product gases from a chemical vapor deposition (CVD) process chamber to a transfer vacuum chamber shared by other process chambers. Separate regulated flows of purge gas are provided to the CVD process chamber and the transfer vacuum chamber before establishing a pathway for substrate transfer. A pressure differential is created between the transfer vacuum chamber and the CVD process chamber that reduces or prevents the migration of CVD reaction by-product gases arising from the establishment of the substrate transfer pathway. While the pathway is established, a directional flow of purge gas is maintained from the transfer vacuum chamber into the CVD process chamber.
    Type: Application
    Filed: June 13, 2002
    Publication date: December 18, 2003
    Applicant: Tokyo Electron Limited of TBS Broadcast Center
    Inventors: Joseph T. Hillman, John G. North, Steven P. Caliendo, John J. Hautala
  • Graphite/carbon articles for elevated temperature service and method of manufacture
    Patent number: 5352523
    Abstract: Graphite carbon surfaces are protected from elevated temperature oxidation and mechanical wear by electric arc thermal spray coating exposed surfaces with a titanium nitride or multi-element (e.g., aluminum-silicon-titanium) coating.
    Type: Grant
    Filed: May 8, 1992
    Date of Patent: October 4, 1994
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Zbigniew Zurecki, Edward A. Hayduk, Jr., John G. North, Robert B. Swan, David L. Mitchell, Jr.
  • Graphite/carbon articles for elevated temperature service and method of manufacture
    Patent number: 5304417
    Abstract: Graphite carbon surfaces are protected from elevated temperature oxidation and mechanical wear by electric arc thermal spray coating exposed surfaces with a titanium nitride or multi-element (e.g., aluminum-silicon-titanium) coating.
    Type: Grant
    Filed: June 2, 1989
    Date of Patent: April 19, 1994
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Zbigniew Zurecki, Edward A. Hayduk, Jr., John G. North, Robert B. Swan, David L. Mitchell, Jr.
  • Method of forming titanium nitride coatings on carbon/graphite substrates by electric arc thermal spray process using titanium feed wire and nitrogen as the atomizing gas
    Patent number: 5254359
    Abstract: Graphite and/or carbon surfaces are coated with a titanium nitride coating by exposing the substrate to electric arc thermal spray process wherein titanium wire as the source of titanium and nitrogen is used as the propelling (atomizing) gas.
    Type: Grant
    Filed: June 14, 1991
    Date of Patent: October 19, 1993
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Zbigniew Zurecki, Edward A. Hayduk, Jr., John G. North, Robert B. Swan, David L. Mitchell, Jr.
  • Method of producing titanium nitride coatings by electric arc thermal spray
    Patent number: 5213848
    Abstract: Surfaces subject to wear and corrosion can have their service life increased by being coated with a composite coating applied by the electric arc thermal spray process using at least one titanium feed wire, optionally pre-nitrided, a second wire of a different metal, metal alloy ceramic or intermetalic compound and nitrogen in the arc spray gun.
    Type: Grant
    Filed: July 9, 1991
    Date of Patent: May 25, 1993
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Zbigneiw Zurecki, Edward A. Hayduk, Jr., John G. North, Robert B. Swan, Kerry R. Berger
  • Method of producing titanium nitride coatings by electric arc thermal spray
    Patent number: 5066513
    Abstract: Wear resistant surfaces can have their service life increased by being coated with a titanium nitride based coating applied by the electric arc thermal spray process using at least one pre-nitrided titanium feed wire and nitrogen in the arc spray gun.
    Type: Grant
    Filed: February 6, 1990
    Date of Patent: November 19, 1991
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Zbigniew Zurecki, Edward A. Hayduk, Jr., John G. North, Robert B. Swan