Abstract: A thermal anemometer or mass flow meter having temperature and flow velocity sensor elements is provided in which a thin film temperature sensor is provided in the heated sensor of the fluid velocity sensor element of the system. The thin-film sensor is captured at least partially within a spacer or interface member, the spacer being received within a housing. The thermal anemometer is constructed to offer sufficient precision and accuracy in its design to be suitable for sensitive scientific and industrial applications. This goal is achieved while using cost effective parts—as in the thin film temperature sensor(s)—in connection with a construction approach minimizing or eliminating gaps or other system configuration variability.

Abstract: Volumetric flow meters, volumetric flow controllers, mass flow meters, and mass flow controllers using a transverse laminar flow assembly are described. The flow assembly may be constructed from a plurality of open and/or closed slices or layers stacked upon one another and held together in compression by through bolts or another means. Meter or flow controller accuracy may be aided by use of flow conditioning features preceding an axial bore of the transverse flow assembly including one or more of a deflector, filter and nozzle.

Abstract: A thermal anemometer or mass flow meter having temperature and flow velocity sensor elements is provided in which a thin film temperature sensor is provided in the heated sensor of the fluid velocity sensor element of the system. The thin-film sensor is captured at least partially within a spacer or interface member, the spacer being received within a housing. The thermal anemometer is constructed to offer sufficient precision and accuracy in its design to be suitable for sensitive scientific and industrial applications. This goal is achieved while using cost effective parts—as in the thin film temperature sensor(s)—in connection with a construction approach minimizing or eliminating gaps or other system configuration variability.

Abstract: An apparatus for the collection of particles from a gas containing particles which comprises a first means for directing the flow of said gas toward a second means for collection of at least a portion of said particles by the process of impaction, the first means containing inlet means which comprises at least one perforation having a length dimension which is greater than its width dimension and a third means between and contacting said first and second means and having an inner wall, which is a smooth closed curve, the third means being located relative to the inlet means and the third means having a configuration such that a substantial number of the streamlines of the flow of said gas after the impaction of at least a portion of said particles in said gas with the second means are in substantial parallelism to the curve of the wall of the third means; the first, second and third means forming an enclosed volume having the inlet means and outlet means for exit of the gas after the impaction of at least a p