Patents by Inventor John H. Bruning
John H. Bruning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8283554Abstract: An apparatus for obtaining radiant energy has first and second photovoltaic receivers. A primary curved reflective surface is disposed to reflect incident polychromatic radiation toward a first focal plane. A spectral separator is disposed between the first focal plane and the primary curved reflective surface. The spectral separator has a dichroic separating surface, convex with respect to the incident reflected polychromatic radiation and treated to reflect a first spectral band toward the first photovoltaic receiver and to transmit reflected polychromatic radiation outside the first spectral band. The spectral separator also has a curved separator reflective surface, convex with respect to the light transmitted through the dichroic separating surface and treated to reflect at least a portion of the light transmitted through the dichroic separating surface toward the second photovoltaic receiver.Type: GrantFiled: November 29, 2006Date of Patent: October 9, 2012Assignee: Corning IncorporatedInventors: John H Bruning, Joshua Monroe Cobb, Paul Francis Michaloski
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Patent number: 7800852Abstract: A positioning apparatus for providing relative movement between a first member and a second member has a lever element pivotably coupled to the first member along a fulcrum member and has an actuator arm and a positioner arm. First and second flexure elements extend between the positioner arm of the lever element and the second member. An actuator is coupled to the actuator arm of the lever element.Type: GrantFiled: February 23, 2009Date of Patent: September 21, 2010Assignee: Corning IncorporatedInventors: Douglass L Blanding, John H Bruning, Jack W Frankovich, Keith E Hanford, Kevin J Magierski
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Patent number: 7741557Abstract: An apparatus for obtaining energy from a polychromatic radiant energy source has a light concentrator for concentrating and redirecting incident radiant energy, having an optical axis, and a spectral separator disposed along the optical axis, apart from the light concentrator and in the path of concentrated, redirected radiant energy. The spectral separator has a first planar surface treated to reflect a first spectral band of light toward a first focal region and to transmit a second spectral band and a second planar surface spaced apart from the first planar surface and oblique with respect to the first planar surface. The second planar surface is treated to reflect the second spectral band back through the first planar surface and toward a second focal region spaced apart from the first focal region. First and second light receivers are disposed nearest each respective focal region for receiving the first and second spectral bands.Type: GrantFiled: August 3, 2006Date of Patent: June 22, 2010Assignee: Corning IncorporatedInventors: Joshua Monroe Cobb, John H Bruning
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Patent number: 7612956Abstract: An optical element mount has an outer member and an inner member. The inner member has a central axis and is suspended within the outer member by a plurality of fold flexures. Each fold flexure has a fold that lies along a line that intersects the central axis at one common point, where the common point serves as a pivot point for rotational movement of the inner member.Type: GrantFiled: February 27, 2008Date of Patent: November 3, 2009Assignee: Corning IncorporatedInventors: Douglass L Blanding, John H Bruning, Jack W Frankovich, Keith E Hanford, Kevin J Magierski, Mark C Sanson
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Patent number: 7609467Abstract: A monolithic optical element mount has an inner member suspended within an outer member and movable with respect to the outer member along an axis. A first set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the first set has a fold that lies on a tangent to a first circle lying in a first plane that is orthogonal to the axis. A second set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the second set has a fold that lies on a tangent to a second circle lying in a second plane that is parallel to the first plane. With respect to a view taken along the axis, the folds for the first set do not align with the folds for the second set.Type: GrantFiled: February 27, 2008Date of Patent: October 27, 2009Assignee: Corning IncorporatedInventors: Douglass L Blanding, John H Bruning
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Publication number: 20090219634Abstract: A positioning apparatus for providing relative movement between a first member and a second member has a lever element pivotably coupled to the first member along a fulcrum member and has an actuator arm and a positioner arm. First and second flexure elements extend between the positioner arm of the lever element and the second member. An actuator is coupled to the actuator arm of the lever element.Type: ApplicationFiled: February 23, 2009Publication date: September 3, 2009Inventors: Douglass L. Blanding, John H. Bruning, Jack W. Frankovich, Keith E. Hanford, Kevin J. Magierski
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Patent number: 7463806Abstract: The present invention provides methods of generating short wavelength radiation, methods of transporting short wavelength radiation, and apparati used in these methods. One embodiment of the invention provides a method of transporting short wavelength radiation using a photonic band gap fiber. Another embodiment of the invention provides a method of transporting short wavelength radiation using a bundle of photonic band gap fibers. Another embodiment of the invention provides a method of generating ultraviolet radiation using high harmonic generation by pumping a noble gas-filled photonic band gap fiber with a pulsed laser source.Type: GrantFiled: May 27, 2004Date of Patent: December 9, 2008Assignee: Corning IncorporatedInventors: Nicholas F. Borrelli, John H. Bruning, Douglas S. Goodman, Karl W. Koch, III, Dirk Mueller, Charlene M. Smith, Alexander Streltsov, James A. West
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Publication number: 20080204907Abstract: A monolithic optical element mount has an inner member suspended within an outer member and movable with respect to the outer member along an axis. A first set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the first set has a fold that lies on a tangent to a first circle lying in a first plane that is orthogonal to the axis. A second set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the second set has a fold that lies on a tangent to a second circle lying in a second plane that is parallel to the first plane. With respect to a view taken along the axis, the folds for the first set do not align with the folds for the second set.Type: ApplicationFiled: February 27, 2008Publication date: August 28, 2008Inventors: Douglass L. Blanding, John H. Bruning
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Publication number: 20080204908Abstract: An optical element mount has an outer member and an inner member. The inner member has a central axis and is suspended within the outer member by a plurality of fold flexures. Each fold flexure has a fold that lies along a line that intersects the central axis at one common point, where the common point serves as a pivot point for rotational movement of the inner member.Type: ApplicationFiled: February 27, 2008Publication date: August 28, 2008Inventors: Douglass L. Blanding, John H. Bruning, Jack W. Frankovich, Keith E. Hanford, Kevin J. Magierski, Mark C. Sanson
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Publication number: 20070137690Abstract: An apparatus for obtaining radiant energy has first and second photovoltaic receivers. A primary curved reflective surface is disposed to reflect incident polychromatic radiation toward a first focal plane. A spectral separator is disposed between the first focal plane and the primary curved reflective surface. The spectral separator has a dichroic separating surface, convex with respect to the incident reflected polychromatic radiation and treated to reflect a first spectral band toward the first photovoltaic receiver and to transmit reflected polychromatic radiation outside the first spectral band. The spectral separator also has a curved separator reflective surface, convex with respect to the light transmitted through the dichroic separating surface and treated to reflect at least a portion of the light transmitted through the dichroic separating surface toward the second photovoltaic receiver.Type: ApplicationFiled: November 29, 2006Publication date: June 21, 2007Inventors: John H. Bruning, Joshua Monroe Cobb, Paul Francis Michaloski
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Patent number: 7140119Abstract: Rotational motions between a displacement-measuring probe and an optical test surface define a spherical or near spherical datum surface against which measurements of the probe are taken. The probe has a measurement axis that is maintained substantially normal to the optical test surface during the course of measurement.Type: GrantFiled: April 23, 2004Date of Patent: November 28, 2006Assignee: Corning IncorporatedInventors: Vivek G. Badami, John H. Bruning
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Patent number: 7075721Abstract: A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.Type: GrantFiled: March 4, 2003Date of Patent: July 11, 2006Assignee: Corning IncorporatedInventors: James E. Webb, John H. Bruning
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Publication number: 20040258381Abstract: The present invention provides methods of generating short wavelength radiation, methods of transporting short wavelength radiation, and apparati used in these methods. One embodiment of the invention provides a method of transporting short wavelength radiation using a photonic band gap fiber. Another embodiment of the invention provides a method of transporting short wavelength radiation using a bundle of photonic band gap fibers. Another embodiment of the invention provides a method of generating ultraviolet radiation using high harmonic generation by pumping a noble gas-filled photonic band gap fiber with a pulsed laser source.Type: ApplicationFiled: May 27, 2004Publication date: December 23, 2004Inventors: Nicholas F. Borrelli, John H. Bruning, Douglas S. Goodman, Karl W. Koch, Dirk Mueller, Charlene M. Smith, Alexander Streltsov, James A. West
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Patent number: 6785051Abstract: Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures in deep ultraviolet (less than 200 nm) microlithographic imaging systems. Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.Type: GrantFiled: July 15, 2002Date of Patent: August 31, 2004Assignee: Corning IncorporatedInventors: Douglas C. Allan, James E. Webb, John H. Bruning
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Publication number: 20030168597Abstract: A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.Type: ApplicationFiled: March 4, 2003Publication date: September 11, 2003Inventors: James E. Webb, John H. Bruning
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Publication number: 20030021026Abstract: Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures in deep ultraviolet (less than 200 nm) microlithographic imaging systems. Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.Type: ApplicationFiled: July 15, 2002Publication date: January 30, 2003Inventors: Douglas C. Allan, James E. Webb, John H. Bruning
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Patent number: 6043886Abstract: Toric surfaces are mounted on a transparent support plate and measured at grazing incidence using a pair of leading and following diffractive optics for diffracting a test beam with respect to a reference beam. The leading diffractive optic diffracts rays of the test beam through various diffraction angles so that after passing through the transparent support plate, the rays strike the toric surface at a constant grazing angle. The following diffractive optic further diffracts the rays of the test beam through other diffraction angles into realignment with the reference beam.Type: GrantFiled: September 2, 1999Date of Patent: March 28, 2000Assignee: Tropel CorporationInventor: John H. Bruning
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Patent number: 5991035Abstract: Toric surfaces are mounted on a transparent support plate and measured at grazing incidence using a pair of leading and following diffractive optics for diffracting a test beam with respect to a reference beam. The leading diffractive optic diffracts rays of the test beam through various diffraction angles so that after passing through the transparent support plate, the rays strike the toric surface at a constant grazing angle. The following diffractive optic further diffracts the rays of the test beam through other diffraction angles into realignment with the reference beam.Type: GrantFiled: February 8, 1999Date of Patent: November 23, 1999Assignee: Tropel CorporationInventor: John H. Bruning
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Patent number: 5982475Abstract: A reduction photolithographic scanning system uses a reduction lens with a circular image field that is shaped to an irregular hexagonal configuration affording different effective scanning widths so that the full area of a microcircuit image can be scanned onto a substrate in an integer number of overlapping scans. This minimizes the number of scans required for each image area and maximizes the total image area that can be scanned per time unit.Type: GrantFiled: September 30, 1997Date of Patent: November 9, 1999Assignee: Tropel CorporationInventor: John H. Bruning
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Patent number: 5909281Abstract: An interferometer (10) employs diffractive optics (30 and 40) for measuring errors in test surfaces (14) that differ from planes and spheres. A beam of light (28) having a planar shape is separated into two portions (32 and 34). One of the diffractive optics (30) can be used to reshape the second portion (34) of a beam of light (28) into a non-planar shape along a path of grazing incidence to the test surface (14), and the other diffractive optic (40) can be used to further reshape the second portion (34) back into a planar shape in common with the first portion (32) of the beam of light (28). The two planar beam portions (32 and 34) are recombined to produce an interference pattern (44) representing the errors in the test surface (14).Type: GrantFiled: June 30, 1997Date of Patent: June 1, 1999Assignee: Tropel CorporationInventor: John H. Bruning