Abstract: A microelectromechanical system (MEMS) device includes: a mechanical layer; a second layer; and a via coupled between the mechanical layer and the second layer. The via comprising a metal layer having a bottom and sides, and oxide on the bottom of the metal layer between the sides of the metal layer.

Abstract: A microelectromechanical system device includes: a substrate; a first electrode on the substrate; a second electrode on the substrate, a first gap between the first electrode and the second electrode; a third electrode on the substrate; a fourth electrode on the substrate, a second gap between the third electrode and the fourth electrode; a first electrode pad on the substrate; a second electrode pad on the substrate; and a hinge extending between the first electrode pad and the second electrode pad. The hinge has a first extension and a second extension, the first extension over the first gap and the second extension over the second gap.

Abstract: Systems and methods for MEMS devices are disclosed. A method includes forming an opening in sacrificial material disposed on a hinge and above a substrate of a micromirror assembly to expose at least a portion of a surface of the hinge; depositing, on the exposed portion of the surface and on the sacrificial material, a first layer of material comprised of a titanium aluminum alloy; and depositing a second layer of material over the first layer of material, the second layer of material comprised of aluminum.

Abstract: Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure further includes an aluminum layer on the first layer.

Abstract: Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure furth includes an aluminum layer on the first layer.

Abstract: A figurine replica of a person such as a player of a particular sport. The figurine replica has a front housing member replicating the front portion of a body of a person except for one limb member, a rear housing member secured to the front housing member and replicating the rear portion of the body of the person except for the limb member, and a replication of the limb member. The limb member has a spring component projecting therefrom and retained between the housing members such that the limb member can be moved by hand and the spring component returns the limb member to its original position. The spring and limb can be molded as a single unit, with the spring either in an elongate configuration for coiling upon assembly of the figurine replica or in an already-coiled configuration.

Abstract: A self-propelled toy vehicle suitable to be given away as a promotional item includes a body shell, having a rear opening or key hole to an internal propulsion mechanism that contains a compression spring. The tip of a separate, key-shaped actuator is insertible into the propulsion mechanism to distort the spring. The actuator also preferably includes a latch member that engages a complimentary capture member in the propulsion mechanism. The latch member is manually disengaged, propelling the body shell forward utilizing the opposing force of the compression spring. The promotional toy is fun and safe to use, and may be manufactured inexpensively.