Abstract: A method for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, a method for delivering a polishing fluid to a polishing surface of a chemical mechanical polisher includes flowing polishing fluid to a first portion of the polishing surface through a first outlet while a second portion of the polishing surface adjacent a second outlet receives no flow of polishing fluid, and flowing polishing fluid through the second outlet to the second portion of the polishing surface.

Abstract: A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.

Abstract: A client/server data processing system is developed by a method (20) in which a meta model (21) is transformed by a model generator (24) into an application model (25) which has a layered structure reflecting that of the end-product system. A code generator is associated with each layer of the application model (25). For the client side, an IDL representation (41) is generated and is transformed into client interfaces (46). Client user interfaces (47) are separately generated.

Abstract: A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.

Abstract: The present invention is directed to a wafer clamping mechanism responsive to fluid pressure to retain wafers on a surface with minimal clamping force. The clamping mechanism houses simple operative elements within a housing proximate the wafer and can utilize existing fluid pressure sources to energize the clamping mechanism. In a first embodiment, the clamping mechanism includes a piston and cylinder to urge a clamping arm against the wafer in response to fluid pressure. In a second embodiment, the clamping mechanism includes a bellows arrangement for urging the clamping finger against the wafer in response to a fluid pressure source. In a third embodiment, the clamping mechanism includes a bladder arrangement wherein a bladder is expanded using fluid pressure to urge the clamping arm against the wafer in response to a fluid pressure source.

Abstract: A client/server data processing system is developed by a method (20) in which a meta model (21) is transformed by a model generator (24) into an application model (25) which has a layered structure reflecting that of the end-product system. A code generator is associated with each layer of the application model (25). For the client side, an IDL representation (41) is generated and is transformed into client interfaces (46). Client user interfaces (47) are separately generated.

Abstract: A method of using waste materials produced by coal combustion to produce useful products. In one embodiment the invention provides solid bricks produced by compressing together fly ash, bottom ash, gypsum, calcium carbonate, and lime. These bricks have sufficient structural strength for use in building and construction. In another embodiment, waste materials are encapsulated in a mixture of fly ash, bottom ash, gypsum, lime, and calcium carbonate and compressed into bricks that may be disposed of in an environmentally acceptable manner. Further, the compressed bricks containing waste material may be coated with an impermeable membrane of a synthetic polymeric material. Further, the invention provides a mobile, trailer-mounted apparatus for compressing the mixtures into bricks.