Abstract: An improved linear hybrid brushless servo motor is disclosed. The motor comprises a forcer and a platen. The forcer has a plurality of stacks, permanent magnets, and coils which form a three-phase motor. The platen has a low cost ferromagnetic steel plate. The stacks, permanent magnets and phase coils of the forcer are specially designed to have the optimal electromagnetic coupling between the forcer and platen to achieve a high force density servomotor. In one embodiment, two E-shaped stacks are used to physically couple two phases to substantially minimize the unexpected cogging force and force ripple. Three other forcer configurations which achieve a three-phase, highly cost effective and high force density linear hybrid brushless servo motor are also disclosed.

Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.