Patents by Inventor John I. Lau

John I. Lau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for varying wafer spacing
    Patent number: 5188499
    Abstract: A wafer handling apparatus having a variable pitch includes a supporting surface (12) for holding a boat (14) in a predetermined location. An elevator mechanism (20) is operable to move upward through the boat to lift wafers (16) upward into intermediate restraining combs (24) and (26). Combs (22) are disposed on the elevator mechanism (20) for holding the wafers (16) on the edges thereof. The combs (22) can have the pitch thereof varied by the operation of a cylinder (56). The combs (22) have two rotating brackets (42) and (40) disposed on the sides thereof. The brackets (42) and (40) are pivoted on an elevator bracket (28) at points (44) and (46). When the lower bracket (40) is reciprocated upward by the cylinder (56) and the associated rod (54), the space between the combs (22) decreases.
    Type: Grant
    Filed: December 14, 1990
    Date of Patent: February 23, 1993
    Assignee: Mactronix
    Inventors: Jawhorng Tarng, John I. Lau