Patents by Inventor John Ivankovits

John Ivankovits has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for supply and delivery of high purity and ultrahigh purity carbon dioxide
    Publication number: 20050155378
    Abstract: A system for the supply and delivery of a high or a ultrahigh purity (UHP) carbon dioxide product stream to at least one process tool within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of the following sub-systems: a carbon dioxide source, a carbon dioxide delivery system, and the point of use (POU) containing at least one process tool.
    Type: Application
    Filed: January 19, 2004
    Publication date: July 21, 2005
    Inventors: Vladimir Gershtein, Paul Mattiola, John Cirucci, John Ivankovits