Abstract: The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.

Abstract: An electron beam lens and deflector array mounting and alignment means are provided. The array is a structure composed of several parallel plates which are held in parallel and axial alignment. The mounting means comprises four slots, one at the end of the four corners of an imaginary rectangle, formed in each facing plate surface. Four cylindrical spacer rods are sandwich between the plates, each seated in two facing slots.